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- W22156118812 hasURL "http://hdl.handle.net/11250/2443683" @default.
- W22156118812 type Location @default.
- W22156118812 hasSource S4306400255 @default.
- W22156118812 hasVersion "acceptedVersion" @default.
- W22156118812 isOa "true" @default.
- W22156118812 pdfUrl "https://ife.brage.unit.no/ife-xmlui/bitstream/11250/2443683/2/Materials_Science%2b_in_Semiconductor_Processing_2016%2bmanuscript_review_karazhanov.pdf" @default.