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- W22409196211 hasURL "https://research.aalto.fi/en/publications/evolution-of-surface-roughness-in-koh-etching-of-silicon-caused-by-material-defects(f10b23de-ea82-4dbf-ae4a-932ea22d4483).html" @default.
- W22409196211 type Location @default.
- W22409196211 hasSource S139116023 @default.
- W22409196211 isOa "false" @default.