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- W22693297191 hasURL "https://doi.org/10.1557/mrs.2016.2" @default.
- W22693297191 type Location @default.
- W22693297191 hasSource S55806205 @default.
- W22693297191 hasVersion "publishedVersion" @default.
- W22693297191 isOa "true" @default.
- W22693297191 pdfUrl "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/BA6652479F5A3209A21395D048133A5C/S0883769416000026a.pdf/div-class-title-origami-mems-and-nems-div.pdf" @default.