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- W27182411611 hasURL "https://doi.org/10.1299/jsmemsd.2009.55" @default.
- W27182411611 type Location @default.
- W27182411611 hasSource S4210220989 @default.
- W27182411611 hasVersion "publishedVersion" @default.
- W27182411611 isOa "true" @default.
- W27182411611 pdfUrl "https://www.jstage.jst.go.jp/article/jsmemsd/2009/0/2009_55/_pdf" @default.