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- W27429414531 hasURL "https://doi.org/10.1017/s143192761700798x" @default.
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- W27429414531 hasSource S98208149 @default.
- W27429414531 hasVersion "publishedVersion" @default.
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- W27429414531 pdfUrl "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/BB7B2624C574673B76C8E0E67F62BA25/S143192761700798Xa.pdf/div-class-title-manganese-segregation-behavior-in-damascene-metal-lines-div.pdf" @default.