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- W27464052801 hasURL "https://doi.org/10.1115/1.4037646" @default.
- W27464052801 type Location @default.
- W27464052801 hasSource S2764568738 @default.
- W27464052801 hasVersion "publishedVersion" @default.
- W27464052801 isOa "true" @default.
- W27464052801 pdfUrl "https://asmedigitalcollection.asme.org/micronanomanufacturing/article-pdf/5/4/041007/5950819/jmnm_005_04_041007.pdf" @default.