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- W27831678341 hasURL "https://doi.org/10.1557/s1092578300003604" @default.
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- W27831678341 hasSource S186240106 @default.
- W27831678341 hasVersion "publishedVersion" @default.
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- W27831678341 pdfUrl "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/E9CC180C13290A5A0DE60CBFEB7403AF/S1092578300003604a.pdf/div-class-title-focused-ion-beam-micromachining-of-gan-photonic-devices-div.pdf" @default.