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- W27895746211 hasURL "https://doi.org/10.1115/1.4039481" @default.
- W27895746211 type Location @default.
- W27895746211 hasSource S2764568738 @default.
- W27895746211 hasVersion "publishedVersion" @default.
- W27895746211 isOa "true" @default.
- W27895746211 pdfUrl "https://asmedigitalcollection.asme.org/micronanomanufacturing/article-pdf/6/3/037001/6581059/jmnm_006_03_037001.pdf" @default.