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- W28903039481 license "cc-by" @default.
- W28903039481 hasURL "https://doi.org/10.1109/jmems.2018.2862863" @default.
- W28903039481 type Location @default.
- W28903039481 hasSource S4210187724 @default.
- W28903039481 hasVersion "publishedVersion" @default.
- W28903039481 isOa "true" @default.
- W28903039481 pdfUrl "https://ieeexplore.ieee.org/ielx7/84/8478115/08438312.pdf" @default.