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- W29173879241 license "cc-by" @default.
- W29173879241 hasURL "https://doi.org/10.1116/1.5083803" @default.
- W29173879241 type Location @default.
- W29173879241 hasSource S68168660 @default.
- W29173879241 hasVersion "publishedVersion" @default.
- W29173879241 isOa "true" @default.
- W29173879241 pdfUrl "https://avs.scitation.org/doi/pdf/10.1116/1.5083803" @default.