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- W29647830291 hasURL "https://doi.org/10.1557/mrs.2019.189" @default.
- W29647830291 type Location @default.
- W29647830291 hasSource S55806205 @default.
- W29647830291 hasVersion "publishedVersion" @default.
- W29647830291 isOa "true" @default.
- W29647830291 pdfUrl "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/8EC4A118EEB853B3612A2867D6F0A0DA/S0883769419001891a.pdf/div-class-title-plasma-enhanced-cvd-dopes-carbon-into-ws-span-class-sub-2-span-div.pdf" @default.