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- W29783123622 hasURL "https://pure.hud.ac.uk/ws/files/17911538/Influence_of_Exposure_Energy_Control_for_High_Voltage_Pulsed_Xenon_Lamp_on_the_Lithography_Accuracy_of_Linear_Grating_zz.pdf" @default.
- W29783123622 type Location @default.
- W29783123622 hasSource S4306402508 @default.
- W29783123622 hasVersion "submittedVersion" @default.
- W29783123622 isOa "true" @default.
- W29783123622 pdfUrl "https://pure.hud.ac.uk/ws/files/17911538/Influence_of_Exposure_Energy_Control_for_High_Voltage_Pulsed_Xenon_Lamp_on_the_Lithography_Accuracy_of_Linear_Grating_zz.pdf" @default.