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- W30007616641 license "cc-by" @default.
- W30007616641 hasURL "https://doi.org/10.1115/1.4046044" @default.
- W30007616641 type Location @default.
- W30007616641 hasSource S2764568738 @default.
- W30007616641 hasVersion "publishedVersion" @default.
- W30007616641 isOa "true" @default.
- W30007616641 pdfUrl "https://asmedigitalcollection.asme.org/micronanomanufacturing/article-pdf/8/1/010911/6532536/jmnm_008_01_010911.pdf" @default.