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- W31140434191 hasURL "https://doi.org/10.1115/1.4049421" @default.
- W31140434191 type Location @default.
- W31140434191 hasSource S2764568738 @default.
- W31140434191 hasVersion "publishedVersion" @default.
- W31140434191 isOa "true" @default.
- W31140434191 pdfUrl "https://asmedigitalcollection.asme.org/micronanomanufacturing/article-pdf/9/1/010901/6632739/jmnm_009_01_010901.pdf" @default.