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- W43766428071 license "cc-by" @default.
- W43766428071 hasURL "https://doi.org/10.1116/6.0002368" @default.
- W43766428071 type Location @default.
- W43766428071 hasSource S81041188 @default.
- W43766428071 hasVersion "publishedVersion" @default.
- W43766428071 isOa "true" @default.
- W43766428071 pdfUrl "https://pubs.aip.org/avs/sss/article-pdf/doi/10.1116/6.0002368/17613437/014011_1_6.0002368.pdf" @default.