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- W43787816481 license "cc-by" @default.
- W43787816481 hasURL "https://doi.org/10.1116/6.0002604" @default.
- W43787816481 type Location @default.
- W43787816481 hasSource S68168660 @default.
- W43787816481 hasVersion "publishedVersion" @default.
- W43787816481 isOa "true" @default.
- W43787816481 pdfUrl "https://pubs.aip.org/avs/bip/article-pdf/doi/10.1116/6.0002604/17910349/031007_1_6.0002604.pdf" @default.