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- W43859790711 license "cc-by" @default.
- W43859790711 hasURL "https://doi.org/10.1116/6.0002703" @default.
- W43859790711 type Location @default.
- W43859790711 hasSource S81041188 @default.
- W43859790711 hasVersion "publishedVersion" @default.
- W43859790711 isOa "true" @default.
- W43859790711 pdfUrl "https://pubs.aip.org/avs/sss/article-pdf/doi/10.1116/6.0002703/18090579/024016_1_6.0002703.pdf" @default.