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- S103101690 issn "1537-1646" @default.
- S103101690 created "2016-06-24" @default.
- S103101690 modified "2023-06-12" @default.
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- S103101690 hasIssnL "1537-1646" @default.
- S103101690 type Source @default.
- S103101690 sameAs 103101690 @default.
- S103101690 sameAs Q96328658 @default.
- S103101690 homepage "http://spie.org/app/Publications/index.cfm?fuseaction=guidelines&type=jm3" @default.
- S103101690 name "Journal of Microlithography, Microfabrication, and Microsystems" @default.
- S103101690 alternativeName "JM3 (Online)" @default.
- S103101690 alternativeName "JM3" @default.
- S103101690 2YrMeanCitedness "0" @default.
- S103101690 citedByCount "1" @default.
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- S103101690 magId "103101690" @default.
- S103101690 sourceType "journal" @default.
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