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- S14676311 issn "1558-2345" @default.
- S14676311 created "2016-06-24" @default.
- S14676311 modified "2023-10-18" @default.
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- S14676311 homepage "http://www.cpmt.org/trans/trans-sm.html" @default.
- S14676311 name "IEEE Transactions on Semiconductor Manufacturing" @default.
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