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- S4210187724 issn "1057-7157" @default.
- S4210187724 issn "1941-0158" @default.
- S4210187724 created "2022-02-03" @default.
- S4210187724 modified "2023-10-19" @default.
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- S4210187724 name "Journal of microelectromechanical systems" @default.
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