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- S4210235835 issn "2166-2746" @default.
- S4210235835 issn "2166-2754" @default.
- S4210235835 created "2022-02-03" @default.
- S4210235835 modified "2023-10-19" @default.
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- S4210235835 homepage "http://scitation.aip.org/content/avs/journal/jvst" @default.
- S4210235835 name "Journal of vacuum science and technology" @default.
- S4210235835 alternativeName "JVST B" @default.
- S4210235835 alternativeName "JVST B, Nanotechnology & microelectronics" @default.
- S4210235835 alternativeName "Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena" @default.
- S4210235835 alternativeName "Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena" @default.
- S4210235835 alternativeName "Journal of vacuum science and technology." @default.
- S4210235835 alternativeName "Nanotechnology & microelectronics" @default.
- S4210235835 alternativeName "Nanotechnology and microelectronics" @default.
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