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- S4306498999 created "2022-10-17" @default.
- S4306498999 modified "2023-10-16" @default.
- S4306498999 h-index "7" @default.
- S4306498999 type Source @default.
- S4306498999 name "23rd Annual International Symposium on Microlithography" @default.
- S4306498999 2YrMeanCitedness "0" @default.
- S4306498999 citedByCount "1" @default.
- S4306498999 i10Index "1" @default.
- S4306498999 isInDoaj "false" @default.
- S4306498999 isOa "false" @default.
- S4306498999 sourceType "journal" @default.
- S4306498999 worksCount "2" @default.