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- S4306499075 created "2022-10-17" @default.
- S4306499075 modified "2023-09-08" @default.
- S4306499075 h-index "9" @default.
- S4306499075 type Source @default.
- S4306499075 name "26th Annual International Symposium on Microlithography" @default.
- S4306499075 2YrMeanCitedness "0" @default.
- S4306499075 citedByCount "0" @default.
- S4306499075 i10Index "9" @default.
- S4306499075 isInDoaj "false" @default.
- S4306499075 isOa "false" @default.
- S4306499075 sourceType "journal" @default.
- S4306499075 worksCount "0" @default.