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- S4306507799 created "2022-10-17" @default.
- S4306507799 modified "2023-10-14" @default.
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- S4306507799 type Source @default.
- S4306507799 name "Design and process integration for microelectronic manufacturing. Conference" @default.
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- S4306507799 i10Index "10" @default.
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- S4306507799 sourceType "conference" @default.
- S4306507799 worksCount "0" @default.