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- S4306519843 created "2022-10-17" @default.
- S4306519843 modified "2023-10-14" @default.
- S4306519843 h-index "9" @default.
- S4306519843 type Source @default.
- S4306519843 name "Metrology, inspection, and process control for microlithography. Conference" @default.
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- S4306519843 i10Index "9" @default.
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- S4306519843 sourceType "conference" @default.
- S4306519843 worksCount "3" @default.