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- S4306530741 created "2022-10-17" @default.
- S4306530741 modified "2023-10-17" @default.
- S4306530741 h-index "8" @default.
- S4306530741 type Source @default.
- S4306530741 name "SPIE's 27th Annual International Symposium on Microlithography" @default.
- S4306530741 2YrMeanCitedness "0" @default.
- S4306530741 citedByCount "7" @default.
- S4306530741 countsByYear S43065307412019 @default.
- S4306530741 i10Index "6" @default.
- S4306530741 isInDoaj "false" @default.
- S4306530741 isOa "false" @default.
- S4306530741 sourceType "journal" @default.
- S4306530741 worksCount "2" @default.