Matches in SemOpenAlex for { <https://semopenalex.org/work/W1160890506> ?p ?o ?g. }
Showing items 1 to 47 of
47
with 100 items per page.
- W1160890506 endingPage "2048" @default.
- W1160890506 startingPage "2045" @default.
- W1160890506 created "2016-06-24" @default.
- W1160890506 creator A5004852934 @default.
- W1160890506 creator A5017892710 @default.
- W1160890506 creator A5026464137 @default.
- W1160890506 creator A5079733943 @default.
- W1160890506 date "1987-01-01" @default.
- W1160890506 modified "2023-09-23" @default.
- W1160890506 title "Spectroscopic diagnostics of photresist erosion in an aluminium etch plasma" @default.
- W1160890506 hasPublicationYear "1987" @default.
- W1160890506 type Work @default.
- W1160890506 sameAs 1160890506 @default.
- W1160890506 citedByCount "0" @default.
- W1160890506 crossrefType "journal-article" @default.
- W1160890506 hasAuthorship W1160890506A5004852934 @default.
- W1160890506 hasAuthorship W1160890506A5017892710 @default.
- W1160890506 hasAuthorship W1160890506A5026464137 @default.
- W1160890506 hasAuthorship W1160890506A5079733943 @default.
- W1160890506 hasConcept C121332964 @default.
- W1160890506 hasConcept C123157820 @default.
- W1160890506 hasConcept C127313418 @default.
- W1160890506 hasConcept C151730666 @default.
- W1160890506 hasConcept C185544564 @default.
- W1160890506 hasConcept C191897082 @default.
- W1160890506 hasConcept C192562407 @default.
- W1160890506 hasConcept C513153333 @default.
- W1160890506 hasConcept C82706917 @default.
- W1160890506 hasConceptScore W1160890506C121332964 @default.
- W1160890506 hasConceptScore W1160890506C123157820 @default.
- W1160890506 hasConceptScore W1160890506C127313418 @default.
- W1160890506 hasConceptScore W1160890506C151730666 @default.
- W1160890506 hasConceptScore W1160890506C185544564 @default.
- W1160890506 hasConceptScore W1160890506C191897082 @default.
- W1160890506 hasConceptScore W1160890506C192562407 @default.
- W1160890506 hasConceptScore W1160890506C513153333 @default.
- W1160890506 hasConceptScore W1160890506C82706917 @default.
- W1160890506 hasIssue "4" @default.
- W1160890506 hasLocation W11608905061 @default.
- W1160890506 hasOpenAccess W1160890506 @default.
- W1160890506 hasPrimaryLocation W11608905061 @default.
- W1160890506 hasRelatedWork W993227440 @default.
- W1160890506 hasVolume "5" @default.
- W1160890506 isParatext "false" @default.
- W1160890506 isRetracted "false" @default.
- W1160890506 magId "1160890506" @default.
- W1160890506 workType "article" @default.