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- W12843357 endingPage "111" @default.
- W12843357 startingPage "107" @default.
- W12843357 created "2016-06-24" @default.
- W12843357 creator A5021912136 @default.
- W12843357 creator A5025844663 @default.
- W12843357 creator A5043196691 @default.
- W12843357 creator A5051035774 @default.
- W12843357 creator A5052624494 @default.
- W12843357 creator A5077419752 @default.
- W12843357 creator A5078117666 @default.
- W12843357 creator A5089835715 @default.
- W12843357 date "2005-12-14" @default.
- W12843357 modified "2023-09-23" @default.
- W12843357 title "マスクエンハンサーを用いた45nmノードリソグラフィ(半導体Si及び関連材料・評価)" @default.
- W12843357 hasPublicationYear "2005" @default.
- W12843357 type Work @default.
- W12843357 sameAs 12843357 @default.
- W12843357 citedByCount "0" @default.
- W12843357 crossrefType "proceedings-article" @default.
- W12843357 hasAuthorship W12843357A5021912136 @default.
- W12843357 hasAuthorship W12843357A5025844663 @default.
- W12843357 hasAuthorship W12843357A5043196691 @default.
- W12843357 hasAuthorship W12843357A5051035774 @default.
- W12843357 hasAuthorship W12843357A5052624494 @default.
- W12843357 hasAuthorship W12843357A5077419752 @default.
- W12843357 hasAuthorship W12843357A5078117666 @default.
- W12843357 hasAuthorship W12843357A5089835715 @default.
- W12843357 hasConcept C41008148 @default.
- W12843357 hasConceptScore W12843357C41008148 @default.
- W12843357 hasIssue "492" @default.
- W12843357 hasLocation W128433571 @default.
- W12843357 hasOpenAccess W12843357 @default.
- W12843357 hasPrimaryLocation W128433571 @default.
- W12843357 hasVolume "105" @default.
- W12843357 isParatext "false" @default.
- W12843357 isRetracted "false" @default.
- W12843357 magId "12843357" @default.
- W12843357 workType "article" @default.