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- W133796192 created "2016-06-24" @default.
- W133796192 creator A5045765911 @default.
- W133796192 creator A5079222531 @default.
- W133796192 creator A5084851332 @default.
- W133796192 date "2002-01-01" @default.
- W133796192 modified "2023-10-05" @default.
- W133796192 title "Low-κ CMP Model Based on Surface Kinetics" @default.
- W133796192 cites W1972207333 @default.
- W133796192 cites W2001012041 @default.
- W133796192 cites W2010234418 @default.
- W133796192 cites W2013422119 @default.
- W133796192 cites W2027964060 @default.
- W133796192 cites W2035067687 @default.
- W133796192 cites W2038481110 @default.
- W133796192 cites W2048451639 @default.
- W133796192 cites W2065638405 @default.
- W133796192 cites W2086481406 @default.
- W133796192 cites W2099804149 @default.
- W133796192 cites W2113205484 @default.
- W133796192 cites W2163090989 @default.
- W133796192 cites W2169251585 @default.
- W133796192 doi "https://doi.org/10.1007/978-1-4615-1165-6_6" @default.
- W133796192 hasPublicationYear "2002" @default.
- W133796192 type Work @default.
- W133796192 sameAs 133796192 @default.
- W133796192 citedByCount "0" @default.
- W133796192 crossrefType "book-chapter" @default.
- W133796192 hasAuthorship W133796192A5045765911 @default.
- W133796192 hasAuthorship W133796192A5079222531 @default.
- W133796192 hasAuthorship W133796192A5084851332 @default.
- W133796192 hasConcept C121332964 @default.
- W133796192 hasConcept C148898269 @default.
- W133796192 hasConcept C192562407 @default.
- W133796192 hasConcept C2524010 @default.
- W133796192 hasConcept C2776799497 @default.
- W133796192 hasConcept C33923547 @default.
- W133796192 hasConcept C62520636 @default.
- W133796192 hasConceptScore W133796192C121332964 @default.
- W133796192 hasConceptScore W133796192C148898269 @default.
- W133796192 hasConceptScore W133796192C192562407 @default.
- W133796192 hasConceptScore W133796192C2524010 @default.
- W133796192 hasConceptScore W133796192C2776799497 @default.
- W133796192 hasConceptScore W133796192C33923547 @default.
- W133796192 hasConceptScore W133796192C62520636 @default.
- W133796192 hasLocation W1337961921 @default.
- W133796192 hasOpenAccess W133796192 @default.
- W133796192 hasPrimaryLocation W1337961921 @default.
- W133796192 hasRelatedWork W2018879842 @default.
- W133796192 hasRelatedWork W2737498735 @default.
- W133796192 hasRelatedWork W2744391499 @default.
- W133796192 hasRelatedWork W2898370298 @default.
- W133796192 hasRelatedWork W2899084033 @default.
- W133796192 hasRelatedWork W3041790586 @default.
- W133796192 hasRelatedWork W3120461830 @default.
- W133796192 hasRelatedWork W3144504424 @default.
- W133796192 hasRelatedWork W4230250635 @default.
- W133796192 hasRelatedWork W4292492973 @default.
- W133796192 isParatext "false" @default.
- W133796192 isRetracted "false" @default.
- W133796192 magId "133796192" @default.
- W133796192 workType "book-chapter" @default.