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- W1488647491 created "2016-06-24" @default.
- W1488647491 creator A5015149667 @default.
- W1488647491 date "1994-01-01" @default.
- W1488647491 modified "2023-09-27" @default.
- W1488647491 title "Optimization of image formation in x-ray lithography using rigorous" @default.
- W1488647491 hasPublicationYear "1994" @default.
- W1488647491 type Work @default.
- W1488647491 sameAs 1488647491 @default.
- W1488647491 citedByCount "0" @default.
- W1488647491 crossrefType "journal-article" @default.
- W1488647491 hasAuthorship W1488647491A5015149667 @default.
- W1488647491 hasConcept C115961682 @default.
- W1488647491 hasConcept C120665830 @default.
- W1488647491 hasConcept C121332964 @default.
- W1488647491 hasConcept C154945302 @default.
- W1488647491 hasConcept C204223013 @default.
- W1488647491 hasConcept C31972630 @default.
- W1488647491 hasConcept C41008148 @default.
- W1488647491 hasConceptScore W1488647491C115961682 @default.
- W1488647491 hasConceptScore W1488647491C120665830 @default.
- W1488647491 hasConceptScore W1488647491C121332964 @default.
- W1488647491 hasConceptScore W1488647491C154945302 @default.
- W1488647491 hasConceptScore W1488647491C204223013 @default.
- W1488647491 hasConceptScore W1488647491C31972630 @default.
- W1488647491 hasConceptScore W1488647491C41008148 @default.
- W1488647491 hasLocation W14886474911 @default.
- W1488647491 hasOpenAccess W1488647491 @default.
- W1488647491 hasPrimaryLocation W14886474911 @default.
- W1488647491 hasRelatedWork W1582433459 @default.
- W1488647491 hasRelatedWork W1873063027 @default.
- W1488647491 hasRelatedWork W1979127398 @default.
- W1488647491 hasRelatedWork W2048656786 @default.
- W1488647491 hasRelatedWork W2050411782 @default.
- W1488647491 hasRelatedWork W2057808659 @default.
- W1488647491 hasRelatedWork W2067220759 @default.
- W1488647491 hasRelatedWork W2128523187 @default.
- W1488647491 hasRelatedWork W2149374085 @default.
- W1488647491 hasRelatedWork W2325400957 @default.
- W1488647491 hasRelatedWork W2345933932 @default.
- W1488647491 hasRelatedWork W2900834191 @default.
- W1488647491 hasRelatedWork W3012224085 @default.
- W1488647491 hasRelatedWork W3193920777 @default.
- W1488647491 hasRelatedWork W396712196 @default.
- W1488647491 hasRelatedWork W635905319 @default.
- W1488647491 hasRelatedWork W1851772823 @default.
- W1488647491 hasRelatedWork W2832667249 @default.
- W1488647491 hasRelatedWork W2850030062 @default.
- W1488647491 hasRelatedWork W2857548125 @default.
- W1488647491 isParatext "false" @default.
- W1488647491 isRetracted "false" @default.
- W1488647491 magId "1488647491" @default.
- W1488647491 workType "article" @default.