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- W1542338911 created "2016-06-24" @default.
- W1542338911 creator A5010845177 @default.
- W1542338911 creator A5042212068 @default.
- W1542338911 creator A5046921282 @default.
- W1542338911 creator A5080525095 @default.
- W1542338911 date "2008-10-14" @default.
- W1542338911 modified "2023-09-24" @default.
- W1542338911 title "Meter-Scale Microwave Plasma Production and its Application to Silicon Thin Film Deposition" @default.
- W1542338911 hasPublicationYear "2008" @default.
- W1542338911 type Work @default.
- W1542338911 sameAs 1542338911 @default.
- W1542338911 citedByCount "0" @default.
- W1542338911 crossrefType "journal-article" @default.
- W1542338911 hasAuthorship W1542338911A5010845177 @default.
- W1542338911 hasAuthorship W1542338911A5042212068 @default.
- W1542338911 hasAuthorship W1542338911A5046921282 @default.
- W1542338911 hasAuthorship W1542338911A5080525095 @default.
- W1542338911 hasConcept C121332964 @default.
- W1542338911 hasConcept C1276947 @default.
- W1542338911 hasConcept C151011524 @default.
- W1542338911 hasConcept C151730666 @default.
- W1542338911 hasConcept C171250308 @default.
- W1542338911 hasConcept C185544564 @default.
- W1542338911 hasConcept C19067145 @default.
- W1542338911 hasConcept C192562407 @default.
- W1542338911 hasConcept C2778755073 @default.
- W1542338911 hasConcept C2816523 @default.
- W1542338911 hasConcept C41008148 @default.
- W1542338911 hasConcept C44838205 @default.
- W1542338911 hasConcept C49040817 @default.
- W1542338911 hasConcept C544956773 @default.
- W1542338911 hasConcept C62520636 @default.
- W1542338911 hasConcept C64297162 @default.
- W1542338911 hasConcept C76155785 @default.
- W1542338911 hasConcept C82706917 @default.
- W1542338911 hasConcept C86803240 @default.
- W1542338911 hasConceptScore W1542338911C121332964 @default.
- W1542338911 hasConceptScore W1542338911C1276947 @default.
- W1542338911 hasConceptScore W1542338911C151011524 @default.
- W1542338911 hasConceptScore W1542338911C151730666 @default.
- W1542338911 hasConceptScore W1542338911C171250308 @default.
- W1542338911 hasConceptScore W1542338911C185544564 @default.
- W1542338911 hasConceptScore W1542338911C19067145 @default.
- W1542338911 hasConceptScore W1542338911C192562407 @default.
- W1542338911 hasConceptScore W1542338911C2778755073 @default.
- W1542338911 hasConceptScore W1542338911C2816523 @default.
- W1542338911 hasConceptScore W1542338911C41008148 @default.
- W1542338911 hasConceptScore W1542338911C44838205 @default.
- W1542338911 hasConceptScore W1542338911C49040817 @default.
- W1542338911 hasConceptScore W1542338911C544956773 @default.
- W1542338911 hasConceptScore W1542338911C62520636 @default.
- W1542338911 hasConceptScore W1542338911C64297162 @default.
- W1542338911 hasConceptScore W1542338911C76155785 @default.
- W1542338911 hasConceptScore W1542338911C82706917 @default.
- W1542338911 hasConceptScore W1542338911C86803240 @default.
- W1542338911 hasLocation W15423389111 @default.
- W1542338911 hasOpenAccess W1542338911 @default.
- W1542338911 hasPrimaryLocation W15423389111 @default.
- W1542338911 hasRelatedWork W1561096930 @default.
- W1542338911 hasRelatedWork W1897821317 @default.
- W1542338911 hasRelatedWork W1987661616 @default.
- W1542338911 hasRelatedWork W2024118155 @default.
- W1542338911 hasRelatedWork W2058561691 @default.
- W1542338911 hasRelatedWork W2075910556 @default.
- W1542338911 hasRelatedWork W2108151680 @default.
- W1542338911 hasRelatedWork W2170442717 @default.
- W1542338911 hasRelatedWork W2561762656 @default.
- W1542338911 hasRelatedWork W2740848611 @default.
- W1542338911 hasRelatedWork W2989923380 @default.
- W1542338911 hasRelatedWork W623266402 @default.
- W1542338911 hasRelatedWork W1573721051 @default.
- W1542338911 hasRelatedWork W2253205928 @default.
- W1542338911 hasRelatedWork W2818545551 @default.
- W1542338911 hasRelatedWork W2832604016 @default.
- W1542338911 hasRelatedWork W2852824479 @default.
- W1542338911 hasRelatedWork W2855151958 @default.
- W1542338911 hasRelatedWork W2863033539 @default.
- W1542338911 hasRelatedWork W3147228700 @default.
- W1542338911 isParatext "false" @default.
- W1542338911 isRetracted "false" @default.
- W1542338911 magId "1542338911" @default.
- W1542338911 workType "article" @default.