Matches in SemOpenAlex for { <https://semopenalex.org/work/W1569010297> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W1569010297 created "2016-06-24" @default.
- W1569010297 creator A5019902486 @default.
- W1569010297 date "2009-12-02" @default.
- W1569010297 modified "2023-09-27" @default.
- W1569010297 title "Thin Films of Copper Oxide and Copper Grown by Atomic Layer Deposition for Applications in Metallization Systems of Microelectronic Devices" @default.
- W1569010297 hasPublicationYear "2009" @default.
- W1569010297 type Work @default.
- W1569010297 sameAs 1569010297 @default.
- W1569010297 citedByCount "0" @default.
- W1569010297 crossrefType "journal-article" @default.
- W1569010297 hasAuthorship W1569010297A5019902486 @default.
- W1569010297 hasConcept C151730666 @default.
- W1569010297 hasConcept C171250308 @default.
- W1569010297 hasConcept C187937830 @default.
- W1569010297 hasConcept C19067145 @default.
- W1569010297 hasConcept C191897082 @default.
- W1569010297 hasConcept C192562407 @default.
- W1569010297 hasConcept C2779227376 @default.
- W1569010297 hasConcept C2779851234 @default.
- W1569010297 hasConcept C2781183027 @default.
- W1569010297 hasConcept C2816523 @default.
- W1569010297 hasConcept C544778455 @default.
- W1569010297 hasConcept C64297162 @default.
- W1569010297 hasConcept C69544855 @default.
- W1569010297 hasConcept C86803240 @default.
- W1569010297 hasConceptScore W1569010297C151730666 @default.
- W1569010297 hasConceptScore W1569010297C171250308 @default.
- W1569010297 hasConceptScore W1569010297C187937830 @default.
- W1569010297 hasConceptScore W1569010297C19067145 @default.
- W1569010297 hasConceptScore W1569010297C191897082 @default.
- W1569010297 hasConceptScore W1569010297C192562407 @default.
- W1569010297 hasConceptScore W1569010297C2779227376 @default.
- W1569010297 hasConceptScore W1569010297C2779851234 @default.
- W1569010297 hasConceptScore W1569010297C2781183027 @default.
- W1569010297 hasConceptScore W1569010297C2816523 @default.
- W1569010297 hasConceptScore W1569010297C544778455 @default.
- W1569010297 hasConceptScore W1569010297C64297162 @default.
- W1569010297 hasConceptScore W1569010297C69544855 @default.
- W1569010297 hasConceptScore W1569010297C86803240 @default.
- W1569010297 hasLocation W15690102971 @default.
- W1569010297 hasOpenAccess W1569010297 @default.
- W1569010297 hasPrimaryLocation W15690102971 @default.
- W1569010297 hasRelatedWork W136590987 @default.
- W1569010297 hasRelatedWork W1548387209 @default.
- W1569010297 hasRelatedWork W2066649429 @default.
- W1569010297 hasRelatedWork W2252881456 @default.
- W1569010297 hasRelatedWork W2331375541 @default.
- W1569010297 hasRelatedWork W2351309491 @default.
- W1569010297 hasRelatedWork W2507356755 @default.
- W1569010297 hasRelatedWork W2765101493 @default.
- W1569010297 hasRelatedWork W2885268454 @default.
- W1569010297 hasRelatedWork W2900194722 @default.
- W1569010297 hasRelatedWork W3047656237 @default.
- W1569010297 hasRelatedWork W3117889233 @default.
- W1569010297 hasRelatedWork W3174549658 @default.
- W1569010297 hasRelatedWork W3203297381 @default.
- W1569010297 hasRelatedWork W3207608989 @default.
- W1569010297 hasRelatedWork W2293790279 @default.
- W1569010297 hasRelatedWork W2831051876 @default.
- W1569010297 hasRelatedWork W2857798490 @default.
- W1569010297 hasRelatedWork W3105142903 @default.
- W1569010297 hasRelatedWork W326520612 @default.
- W1569010297 isParatext "false" @default.
- W1569010297 isRetracted "false" @default.
- W1569010297 magId "1569010297" @default.
- W1569010297 workType "article" @default.