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- W1574521137 endingPage "30" @default.
- W1574521137 startingPage "25" @default.
- W1574521137 created "2016-06-24" @default.
- W1574521137 creator A5002949882 @default.
- W1574521137 creator A5070862415 @default.
- W1574521137 date "2000-06-21" @default.
- W1574521137 modified "2023-09-26" @default.
- W1574521137 title "ED2000-48 / SDM2000-48 Sub 4-nm Polyoxide Using ECR(Electron Cyclotron Resonance) N_2O Plasma Oxidation" @default.
- W1574521137 hasPublicationYear "2000" @default.
- W1574521137 type Work @default.
- W1574521137 sameAs 1574521137 @default.
- W1574521137 citedByCount "0" @default.
- W1574521137 crossrefType "proceedings-article" @default.
- W1574521137 hasAuthorship W1574521137A5002949882 @default.
- W1574521137 hasAuthorship W1574521137A5070862415 @default.
- W1574521137 hasConcept C121332964 @default.
- W1574521137 hasConcept C139210041 @default.
- W1574521137 hasConcept C147120987 @default.
- W1574521137 hasConcept C175361016 @default.
- W1574521137 hasConcept C184779094 @default.
- W1574521137 hasConcept C185544564 @default.
- W1574521137 hasConcept C185592680 @default.
- W1574521137 hasConcept C192562407 @default.
- W1574521137 hasConcept C39527238 @default.
- W1574521137 hasConcept C82706917 @default.
- W1574521137 hasConceptScore W1574521137C121332964 @default.
- W1574521137 hasConceptScore W1574521137C139210041 @default.
- W1574521137 hasConceptScore W1574521137C147120987 @default.
- W1574521137 hasConceptScore W1574521137C175361016 @default.
- W1574521137 hasConceptScore W1574521137C184779094 @default.
- W1574521137 hasConceptScore W1574521137C185544564 @default.
- W1574521137 hasConceptScore W1574521137C185592680 @default.
- W1574521137 hasConceptScore W1574521137C192562407 @default.
- W1574521137 hasConceptScore W1574521137C39527238 @default.
- W1574521137 hasConceptScore W1574521137C82706917 @default.
- W1574521137 hasIssue "150" @default.
- W1574521137 hasLocation W15745211371 @default.
- W1574521137 hasOpenAccess W1574521137 @default.
- W1574521137 hasPrimaryLocation W15745211371 @default.
- W1574521137 hasRelatedWork W1597604009 @default.
- W1574521137 hasRelatedWork W1714576144 @default.
- W1574521137 hasRelatedWork W2002190976 @default.
- W1574521137 hasRelatedWork W2014404741 @default.
- W1574521137 hasRelatedWork W2016983241 @default.
- W1574521137 hasRelatedWork W2028036570 @default.
- W1574521137 hasRelatedWork W2036269264 @default.
- W1574521137 hasRelatedWork W2048006714 @default.
- W1574521137 hasRelatedWork W2050573461 @default.
- W1574521137 hasRelatedWork W2084100411 @default.
- W1574521137 hasRelatedWork W2090550466 @default.
- W1574521137 hasRelatedWork W2106619646 @default.
- W1574521137 hasRelatedWork W2134328074 @default.
- W1574521137 hasRelatedWork W2144097057 @default.
- W1574521137 hasRelatedWork W2299760578 @default.
- W1574521137 hasRelatedWork W2396665139 @default.
- W1574521137 hasRelatedWork W2524002372 @default.
- W1574521137 hasRelatedWork W2764481062 @default.
- W1574521137 hasRelatedWork W592854355 @default.
- W1574521137 hasRelatedWork W3027618227 @default.
- W1574521137 hasVolume "100" @default.
- W1574521137 isParatext "false" @default.
- W1574521137 isRetracted "false" @default.
- W1574521137 magId "1574521137" @default.
- W1574521137 workType "article" @default.