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- W1630729483 created "2016-06-24" @default.
- W1630729483 creator A5044545061 @default.
- W1630729483 creator A5045414136 @default.
- W1630729483 creator A5055545325 @default.
- W1630729483 creator A5059026313 @default.
- W1630729483 date "2005-03-25" @default.
- W1630729483 modified "2023-09-27" @default.
- W1630729483 title "Atomic Layer Deposition of High-k Dielectrics Using Supercritical CO$_2$" @default.
- W1630729483 hasPublicationYear "2005" @default.
- W1630729483 type Work @default.
- W1630729483 sameAs 1630729483 @default.
- W1630729483 citedByCount "0" @default.
- W1630729483 crossrefType "journal-article" @default.
- W1630729483 hasAuthorship W1630729483A5044545061 @default.
- W1630729483 hasAuthorship W1630729483A5045414136 @default.
- W1630729483 hasAuthorship W1630729483A5055545325 @default.
- W1630729483 hasAuthorship W1630729483A5059026313 @default.
- W1630729483 hasConcept C118419359 @default.
- W1630729483 hasConcept C127313418 @default.
- W1630729483 hasConcept C127413603 @default.
- W1630729483 hasConcept C133386390 @default.
- W1630729483 hasConcept C151730666 @default.
- W1630729483 hasConcept C159985019 @default.
- W1630729483 hasConcept C16317505 @default.
- W1630729483 hasConcept C178790620 @default.
- W1630729483 hasConcept C185592680 @default.
- W1630729483 hasConcept C192562407 @default.
- W1630729483 hasConcept C2779227376 @default.
- W1630729483 hasConcept C2816523 @default.
- W1630729483 hasConcept C42360764 @default.
- W1630729483 hasConcept C49040817 @default.
- W1630729483 hasConcept C64297162 @default.
- W1630729483 hasConcept C69544855 @default.
- W1630729483 hasConceptScore W1630729483C118419359 @default.
- W1630729483 hasConceptScore W1630729483C127313418 @default.
- W1630729483 hasConceptScore W1630729483C127413603 @default.
- W1630729483 hasConceptScore W1630729483C133386390 @default.
- W1630729483 hasConceptScore W1630729483C151730666 @default.
- W1630729483 hasConceptScore W1630729483C159985019 @default.
- W1630729483 hasConceptScore W1630729483C16317505 @default.
- W1630729483 hasConceptScore W1630729483C178790620 @default.
- W1630729483 hasConceptScore W1630729483C185592680 @default.
- W1630729483 hasConceptScore W1630729483C192562407 @default.
- W1630729483 hasConceptScore W1630729483C2779227376 @default.
- W1630729483 hasConceptScore W1630729483C2816523 @default.
- W1630729483 hasConceptScore W1630729483C42360764 @default.
- W1630729483 hasConceptScore W1630729483C49040817 @default.
- W1630729483 hasConceptScore W1630729483C64297162 @default.
- W1630729483 hasConceptScore W1630729483C69544855 @default.
- W1630729483 hasLocation W16307294831 @default.
- W1630729483 hasOpenAccess W1630729483 @default.
- W1630729483 hasPrimaryLocation W16307294831 @default.
- W1630729483 hasRelatedWork W1963929486 @default.
- W1630729483 hasRelatedWork W1966194576 @default.
- W1630729483 hasRelatedWork W2010251245 @default.
- W1630729483 hasRelatedWork W2034047417 @default.
- W1630729483 hasRelatedWork W2036891017 @default.
- W1630729483 hasRelatedWork W2040770001 @default.
- W1630729483 hasRelatedWork W2067963670 @default.
- W1630729483 hasRelatedWork W2084705644 @default.
- W1630729483 hasRelatedWork W2138541316 @default.
- W1630729483 hasRelatedWork W2186081064 @default.
- W1630729483 hasRelatedWork W2199694124 @default.
- W1630729483 hasRelatedWork W2364060322 @default.
- W1630729483 hasRelatedWork W2496747633 @default.
- W1630729483 hasRelatedWork W2541380483 @default.
- W1630729483 hasRelatedWork W2550472629 @default.
- W1630729483 hasRelatedWork W2788131428 @default.
- W1630729483 hasRelatedWork W2951879816 @default.
- W1630729483 hasRelatedWork W3023517539 @default.
- W1630729483 hasRelatedWork W3113710154 @default.
- W1630729483 hasRelatedWork W2581114427 @default.
- W1630729483 isParatext "false" @default.
- W1630729483 isRetracted "false" @default.
- W1630729483 magId "1630729483" @default.
- W1630729483 workType "article" @default.