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Matches in SemOpenAlex for { <https://semopenalex.org/work/W163088729> ?p ?o ?g. }

• W163088729 endingPage "365" @default.
• W163088729 startingPage "338" @default.
• W163088729 created "2016-06-24" @default.
• W163088729 creator A5081017202 @default.
• W163088729 date "1986-01-01" @default.
• W163088729 modified "2023-09-28" @default.
• W163088729 title "Applications of Ion Beams in Microlithography" @default.
• W163088729 cites W1967524995 @default.
• W163088729 cites W1974937922 @default.
• W163088729 cites W1981233559 @default.
• W163088729 cites W1994794230 @default.
• W163088729 cites W2002186517 @default.
• W163088729 cites W2009179400 @default.
• W163088729 cites W2014537078 @default.
• W163088729 cites W2015890702 @default.
• W163088729 cites W2016064186 @default.
• W163088729 cites W2021359385 @default.
• W163088729 cites W2021738493 @default.
• W163088729 cites W2023460005 @default.
• W163088729 cites W2024149620 @default.
• W163088729 cites W2025720102 @default.
• W163088729 cites W2048650994 @default.
• W163088729 cites W2057071648 @default.
• W163088729 cites W2057391139 @default.
• W163088729 cites W2058091262 @default.
• W163088729 cites W2060224839 @default.
• W163088729 cites W2063651126 @default.
• W163088729 cites W2070807995 @default.
• W163088729 cites W2071620103 @default.
• W163088729 cites W2072324727 @default.
• W163088729 cites W2074428935 @default.
• W163088729 cites W2076913733 @default.
• W163088729 cites W2078275442 @default.
• W163088729 cites W2078351428 @default.
• W163088729 cites W2085886533 @default.
• W163088729 cites W2089209243 @default.
• W163088729 cites W2092434879 @default.
• W163088729 cites W2095101154 @default.
• W163088729 cites W2167699112 @default.
• W163088729 doi "https://doi.org/10.1007/978-94-009-4422-0_20" @default.
• W163088729 hasPublicationYear "1986" @default.
• W163088729 type Work @default.
• W163088729 sameAs 163088729 @default.
• W163088729 citedByCount "0" @default.
• W163088729 crossrefType "book-chapter" @default.
• W163088729 hasAuthorship W163088729A5081017202 @default.
• W163088729 hasConcept C105487726 @default.
• W163088729 hasConcept C120665830 @default.
• W163088729 hasConcept C121332964 @default.
• W163088729 hasConcept C121684516 @default.
• W163088729 hasConcept C136525101 @default.
• W163088729 hasConcept C142724271 @default.
• W163088729 hasConcept C159985019 @default.
• W163088729 hasConcept C162996421 @default.
• W163088729 hasConcept C163581340 @default.
• W163088729 hasConcept C171250308 @default.
• W163088729 hasConcept C192562407 @default.
• W163088729 hasConcept C200274948 @default.
• W163088729 hasConcept C204223013 @default.
• W163088729 hasConcept C204787440 @default.
• W163088729 hasConcept C205711294 @default.
• W163088729 hasConcept C2779227376 @default.
• W163088729 hasConcept C2987116853 @default.
• W163088729 hasConcept C41008148 @default.
• W163088729 hasConcept C41794268 @default.
• W163088729 hasConcept C49040817 @default.
• W163088729 hasConcept C521977710 @default.
• W163088729 hasConcept C53524968 @default.
• W163088729 hasConcept C71924100 @default.
• W163088729 hasConceptScore W163088729C105487726 @default.
• W163088729 hasConceptScore W163088729C120665830 @default.
• W163088729 hasConceptScore W163088729C121332964 @default.
• W163088729 hasConceptScore W163088729C121684516 @default.
• W163088729 hasConceptScore W163088729C136525101 @default.
• W163088729 hasConceptScore W163088729C142724271 @default.
• W163088729 hasConceptScore W163088729C159985019 @default.
• W163088729 hasConceptScore W163088729C162996421 @default.
• W163088729 hasConceptScore W163088729C163581340 @default.
• W163088729 hasConceptScore W163088729C171250308 @default.
• W163088729 hasConceptScore W163088729C192562407 @default.
• W163088729 hasConceptScore W163088729C200274948 @default.
• W163088729 hasConceptScore W163088729C204223013 @default.
• W163088729 hasConceptScore W163088729C204787440 @default.
• W163088729 hasConceptScore W163088729C205711294 @default.
• W163088729 hasConceptScore W163088729C2779227376 @default.
• W163088729 hasConceptScore W163088729C2987116853 @default.
• W163088729 hasConceptScore W163088729C41008148 @default.
• W163088729 hasConceptScore W163088729C41794268 @default.
• W163088729 hasConceptScore W163088729C49040817 @default.
• W163088729 hasConceptScore W163088729C521977710 @default.
• W163088729 hasConceptScore W163088729C53524968 @default.
• W163088729 hasConceptScore W163088729C71924100 @default.
• W163088729 hasLocation W1630887291 @default.
• W163088729 hasOpenAccess W163088729 @default.
• W163088729 hasPrimaryLocation W1630887291 @default.
• W163088729 hasRelatedWork W1996488490 @default.
• W163088729 hasRelatedWork W2031480932 @default.
• W163088729 hasRelatedWork W2062347298 @default.
• W163088729 hasRelatedWork W2092309559 @default.
• W163088729 hasRelatedWork W2114890493 @default.

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