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- W173085685 endingPage "28" @default.
- W173085685 startingPage "21" @default.
- W173085685 created "2016-06-24" @default.
- W173085685 creator A5014226739 @default.
- W173085685 creator A5044453321 @default.
- W173085685 date "1996-11-08" @default.
- W173085685 modified "2023-09-26" @default.
- W173085685 title "Cu/W-nitride/Siコンタクト系における W-nitride 薄膜のバリヤ特性" @default.
- W173085685 hasPublicationYear "1996" @default.
- W173085685 type Work @default.
- W173085685 sameAs 173085685 @default.
- W173085685 citedByCount "0" @default.
- W173085685 crossrefType "proceedings-article" @default.
- W173085685 hasAuthorship W173085685A5014226739 @default.
- W173085685 hasAuthorship W173085685A5044453321 @default.
- W173085685 hasConcept C171250308 @default.
- W173085685 hasConcept C192562407 @default.
- W173085685 hasConcept C194760766 @default.
- W173085685 hasConcept C2777431650 @default.
- W173085685 hasConcept C2779227376 @default.
- W173085685 hasConcept C49040817 @default.
- W173085685 hasConcept C544956773 @default.
- W173085685 hasConceptScore W173085685C171250308 @default.
- W173085685 hasConceptScore W173085685C192562407 @default.
- W173085685 hasConceptScore W173085685C194760766 @default.
- W173085685 hasConceptScore W173085685C2777431650 @default.
- W173085685 hasConceptScore W173085685C2779227376 @default.
- W173085685 hasConceptScore W173085685C49040817 @default.
- W173085685 hasConceptScore W173085685C544956773 @default.
- W173085685 hasIssue "350" @default.
- W173085685 hasLocation W1730856851 @default.
- W173085685 hasOpenAccess W173085685 @default.
- W173085685 hasPrimaryLocation W1730856851 @default.
- W173085685 hasVolume "96" @default.
- W173085685 isParatext "false" @default.
- W173085685 isRetracted "false" @default.
- W173085685 magId "173085685" @default.
- W173085685 workType "article" @default.