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- W182085513 created "2016-06-24" @default.
- W182085513 creator A5000454702 @default.
- W182085513 creator A5018507543 @default.
- W182085513 date "1995-07-01" @default.
- W182085513 modified "2023-10-11" @default.
- W182085513 title "Features of copper etching in chlorine-argon plasma" @default.
- W182085513 hasPublicationYear "1995" @default.
- W182085513 type Work @default.
- W182085513 sameAs 182085513 @default.
- W182085513 citedByCount "0" @default.
- W182085513 crossrefType "journal-article" @default.
- W182085513 hasAuthorship W182085513A5000454702 @default.
- W182085513 hasAuthorship W182085513A5018507543 @default.
- W182085513 hasConcept C100460472 @default.
- W182085513 hasConcept C107187091 @default.
- W182085513 hasConcept C107872376 @default.
- W182085513 hasConcept C113196181 @default.
- W182085513 hasConcept C121332964 @default.
- W182085513 hasConcept C1291036 @default.
- W182085513 hasConcept C130472188 @default.
- W182085513 hasConcept C154256306 @default.
- W182085513 hasConcept C171250308 @default.
- W182085513 hasConcept C178790620 @default.
- W182085513 hasConcept C179104552 @default.
- W182085513 hasConcept C185592680 @default.
- W182085513 hasConcept C187937830 @default.
- W182085513 hasConcept C192562407 @default.
- W182085513 hasConcept C2779227376 @default.
- W182085513 hasConcept C505241676 @default.
- W182085513 hasConcept C544778455 @default.
- W182085513 hasConcept C544956773 @default.
- W182085513 hasConcept C547737533 @default.
- W182085513 hasConcept C55766333 @default.
- W182085513 hasConcept C62520636 @default.
- W182085513 hasConcept C82706917 @default.
- W182085513 hasConceptScore W182085513C100460472 @default.
- W182085513 hasConceptScore W182085513C107187091 @default.
- W182085513 hasConceptScore W182085513C107872376 @default.
- W182085513 hasConceptScore W182085513C113196181 @default.
- W182085513 hasConceptScore W182085513C121332964 @default.
- W182085513 hasConceptScore W182085513C1291036 @default.
- W182085513 hasConceptScore W182085513C130472188 @default.
- W182085513 hasConceptScore W182085513C154256306 @default.
- W182085513 hasConceptScore W182085513C171250308 @default.
- W182085513 hasConceptScore W182085513C178790620 @default.
- W182085513 hasConceptScore W182085513C179104552 @default.
- W182085513 hasConceptScore W182085513C185592680 @default.
- W182085513 hasConceptScore W182085513C187937830 @default.
- W182085513 hasConceptScore W182085513C192562407 @default.
- W182085513 hasConceptScore W182085513C2779227376 @default.
- W182085513 hasConceptScore W182085513C505241676 @default.
- W182085513 hasConceptScore W182085513C544778455 @default.
- W182085513 hasConceptScore W182085513C544956773 @default.
- W182085513 hasConceptScore W182085513C547737533 @default.
- W182085513 hasConceptScore W182085513C55766333 @default.
- W182085513 hasConceptScore W182085513C62520636 @default.
- W182085513 hasConceptScore W182085513C82706917 @default.
- W182085513 hasIssue "4" @default.
- W182085513 hasLocation W1820855131 @default.
- W182085513 hasOpenAccess W182085513 @default.
- W182085513 hasPrimaryLocation W1820855131 @default.
- W182085513 hasRelatedWork W1992056522 @default.
- W182085513 hasRelatedWork W1992249998 @default.
- W182085513 hasRelatedWork W2009176659 @default.
- W182085513 hasRelatedWork W2017957807 @default.
- W182085513 hasRelatedWork W2032270196 @default.
- W182085513 hasRelatedWork W2039503022 @default.
- W182085513 hasRelatedWork W2042223251 @default.
- W182085513 hasRelatedWork W2042515516 @default.
- W182085513 hasRelatedWork W2045240859 @default.
- W182085513 hasRelatedWork W2055542123 @default.
- W182085513 hasRelatedWork W2056494714 @default.
- W182085513 hasRelatedWork W2059504210 @default.
- W182085513 hasRelatedWork W2084954072 @default.
- W182085513 hasRelatedWork W2090174675 @default.
- W182085513 hasRelatedWork W2094340051 @default.
- W182085513 hasRelatedWork W22801016 @default.
- W182085513 hasRelatedWork W2336674323 @default.
- W182085513 hasRelatedWork W2551706931 @default.
- W182085513 hasRelatedWork W2902562904 @default.
- W182085513 hasRelatedWork W2921537457 @default.
- W182085513 hasVolume "29" @default.
- W182085513 isParatext "false" @default.
- W182085513 isRetracted "false" @default.
- W182085513 magId "182085513" @default.
- W182085513 workType "article" @default.