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- W1851800164 created "2016-06-24" @default.
- W1851800164 creator A5004900797 @default.
- W1851800164 creator A5010832347 @default.
- W1851800164 creator A5011297808 @default.
- W1851800164 creator A5014363116 @default.
- W1851800164 creator A5052378589 @default.
- W1851800164 creator A5053048182 @default.
- W1851800164 creator A5053774133 @default.
- W1851800164 date "2005-01-01" @default.
- W1851800164 modified "2023-10-18" @default.
- W1851800164 title "The Adhesion of Pad Particles on Wafer Surfaces during Cu CMP" @default.
- W1851800164 cites W1972062024 @default.
- W1851800164 cites W2095894848 @default.
- W1851800164 doi "https://doi.org/10.1557/proc-867-w1.9" @default.
- W1851800164 hasPublicationYear "2005" @default.
- W1851800164 type Work @default.
- W1851800164 sameAs 1851800164 @default.
- W1851800164 citedByCount "1" @default.
- W1851800164 countsByYear W18518001642012 @default.
- W1851800164 crossrefType "journal-article" @default.
- W1851800164 hasAuthorship W1851800164A5004900797 @default.
- W1851800164 hasAuthorship W1851800164A5010832347 @default.
- W1851800164 hasAuthorship W1851800164A5011297808 @default.
- W1851800164 hasAuthorship W1851800164A5014363116 @default.
- W1851800164 hasAuthorship W1851800164A5052378589 @default.
- W1851800164 hasAuthorship W1851800164A5053048182 @default.
- W1851800164 hasAuthorship W1851800164A5053774133 @default.
- W1851800164 hasConcept C111368507 @default.
- W1851800164 hasConcept C127313418 @default.
- W1851800164 hasConcept C127413603 @default.
- W1851800164 hasConcept C155672457 @default.
- W1851800164 hasConcept C159985019 @default.
- W1851800164 hasConcept C160671074 @default.
- W1851800164 hasConcept C171250308 @default.
- W1851800164 hasConcept C181199279 @default.
- W1851800164 hasConcept C185592680 @default.
- W1851800164 hasConcept C192562407 @default.
- W1851800164 hasConcept C2778517922 @default.
- W1851800164 hasConcept C42360764 @default.
- W1851800164 hasConcept C55493867 @default.
- W1851800164 hasConcept C84416704 @default.
- W1851800164 hasConcept C86181022 @default.
- W1851800164 hasConcept C94293008 @default.
- W1851800164 hasConcept C96294017 @default.
- W1851800164 hasConceptScore W1851800164C111368507 @default.
- W1851800164 hasConceptScore W1851800164C127313418 @default.
- W1851800164 hasConceptScore W1851800164C127413603 @default.
- W1851800164 hasConceptScore W1851800164C155672457 @default.
- W1851800164 hasConceptScore W1851800164C159985019 @default.
- W1851800164 hasConceptScore W1851800164C160671074 @default.
- W1851800164 hasConceptScore W1851800164C171250308 @default.
- W1851800164 hasConceptScore W1851800164C181199279 @default.
- W1851800164 hasConceptScore W1851800164C185592680 @default.
- W1851800164 hasConceptScore W1851800164C192562407 @default.
- W1851800164 hasConceptScore W1851800164C2778517922 @default.
- W1851800164 hasConceptScore W1851800164C42360764 @default.
- W1851800164 hasConceptScore W1851800164C55493867 @default.
- W1851800164 hasConceptScore W1851800164C84416704 @default.
- W1851800164 hasConceptScore W1851800164C86181022 @default.
- W1851800164 hasConceptScore W1851800164C94293008 @default.
- W1851800164 hasConceptScore W1851800164C96294017 @default.
- W1851800164 hasLocation W18518001641 @default.
- W1851800164 hasOpenAccess W1851800164 @default.
- W1851800164 hasPrimaryLocation W18518001641 @default.
- W1851800164 hasRelatedWork W1851800164 @default.
- W1851800164 hasRelatedWork W1956934354 @default.
- W1851800164 hasRelatedWork W1965057326 @default.
- W1851800164 hasRelatedWork W1987719550 @default.
- W1851800164 hasRelatedWork W2049941792 @default.
- W1851800164 hasRelatedWork W2064734923 @default.
- W1851800164 hasRelatedWork W2107553265 @default.
- W1851800164 hasRelatedWork W2200285409 @default.
- W1851800164 hasRelatedWork W2374898626 @default.
- W1851800164 hasRelatedWork W3160341604 @default.
- W1851800164 isParatext "false" @default.
- W1851800164 isRetracted "false" @default.
- W1851800164 magId "1851800164" @default.
- W1851800164 workType "article" @default.