Matches in SemOpenAlex for { <https://semopenalex.org/work/W1945615050> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W1945615050 created "2016-06-24" @default.
- W1945615050 creator A5043102620 @default.
- W1945615050 creator A5055348625 @default.
- W1945615050 date "2005-08-29" @default.
- W1945615050 modified "2023-09-27" @default.
- W1945615050 title "Silicon bulk micromachining" @default.
- W1945615050 cites W1486990221 @default.
- W1945615050 cites W1778696981 @default.
- W1945615050 cites W1900261317 @default.
- W1945615050 cites W1968398733 @default.
- W1945615050 cites W1970936215 @default.
- W1945615050 cites W1973402320 @default.
- W1945615050 cites W1977471537 @default.
- W1945615050 cites W1994480027 @default.
- W1945615050 cites W2035203106 @default.
- W1945615050 cites W2078933343 @default.
- W1945615050 cites W2079016706 @default.
- W1945615050 cites W2108402166 @default.
- W1945615050 cites W2122861302 @default.
- W1945615050 cites W2148021792 @default.
- W1945615050 cites W2168499915 @default.
- W1945615050 cites W2171519766 @default.
- W1945615050 cites W2291199462 @default.
- W1945615050 cites W3162037820 @default.
- W1945615050 doi "https://doi.org/10.1109/mmb.2000.893730" @default.
- W1945615050 hasPublicationYear "2005" @default.
- W1945615050 type Work @default.
- W1945615050 sameAs 1945615050 @default.
- W1945615050 citedByCount "1" @default.
- W1945615050 crossrefType "proceedings-article" @default.
- W1945615050 hasAuthorship W1945615050A5043102620 @default.
- W1945615050 hasAuthorship W1945615050A5055348625 @default.
- W1945615050 hasConcept C136525101 @default.
- W1945615050 hasConcept C142724271 @default.
- W1945615050 hasConcept C145667562 @default.
- W1945615050 hasConcept C191897082 @default.
- W1945615050 hasConcept C192562407 @default.
- W1945615050 hasConcept C204787440 @default.
- W1945615050 hasConcept C544956773 @default.
- W1945615050 hasConcept C71924100 @default.
- W1945615050 hasConceptScore W1945615050C136525101 @default.
- W1945615050 hasConceptScore W1945615050C142724271 @default.
- W1945615050 hasConceptScore W1945615050C145667562 @default.
- W1945615050 hasConceptScore W1945615050C191897082 @default.
- W1945615050 hasConceptScore W1945615050C192562407 @default.
- W1945615050 hasConceptScore W1945615050C204787440 @default.
- W1945615050 hasConceptScore W1945615050C544956773 @default.
- W1945615050 hasConceptScore W1945615050C71924100 @default.
- W1945615050 hasLocation W19456150501 @default.
- W1945615050 hasOpenAccess W1945615050 @default.
- W1945615050 hasPrimaryLocation W19456150501 @default.
- W1945615050 hasRelatedWork W199926285 @default.
- W1945615050 hasRelatedWork W2028768478 @default.
- W1945615050 hasRelatedWork W2068488406 @default.
- W1945615050 hasRelatedWork W2255833311 @default.
- W1945615050 hasRelatedWork W2543326717 @default.
- W1945615050 hasRelatedWork W2743693857 @default.
- W1945615050 hasRelatedWork W2744329487 @default.
- W1945615050 hasRelatedWork W2749459506 @default.
- W1945615050 hasRelatedWork W2944642712 @default.
- W1945615050 hasRelatedWork W3026937641 @default.
- W1945615050 hasRelatedWork W3041350709 @default.
- W1945615050 hasRelatedWork W3041534838 @default.
- W1945615050 hasRelatedWork W3048451006 @default.
- W1945615050 hasRelatedWork W3103506166 @default.
- W1945615050 hasRelatedWork W3112894278 @default.
- W1945615050 hasRelatedWork W3132392473 @default.
- W1945615050 hasRelatedWork W3213376318 @default.
- W1945615050 hasRelatedWork W3213981191 @default.
- W1945615050 hasRelatedWork W651174558 @default.
- W1945615050 hasRelatedWork W3089242920 @default.
- W1945615050 isParatext "false" @default.
- W1945615050 isRetracted "false" @default.
- W1945615050 magId "1945615050" @default.
- W1945615050 workType "article" @default.