Matches in SemOpenAlex for { <https://semopenalex.org/work/W1964128673> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W1964128673 endingPage "73" @default.
- W1964128673 startingPage "67" @default.
- W1964128673 created "2016-06-24" @default.
- W1964128673 creator A5035718693 @default.
- W1964128673 creator A5051006784 @default.
- W1964128673 creator A5066869827 @default.
- W1964128673 date "1994-04-01" @default.
- W1964128673 modified "2023-09-27" @default.
- W1964128673 title "A new CVD reactor for semiconductor film deposition" @default.
- W1964128673 cites W1988692659 @default.
- W1964128673 cites W2014490687 @default.
- W1964128673 cites W2017274155 @default.
- W1964128673 cites W2035644331 @default.
- W1964128673 cites W2161097100 @default.
- W1964128673 doi "https://doi.org/10.1007/bf02697357" @default.
- W1964128673 hasPublicationYear "1994" @default.
- W1964128673 type Work @default.
- W1964128673 sameAs 1964128673 @default.
- W1964128673 citedByCount "3" @default.
- W1964128673 crossrefType "journal-article" @default.
- W1964128673 hasAuthorship W1964128673A5035718693 @default.
- W1964128673 hasAuthorship W1964128673A5051006784 @default.
- W1964128673 hasAuthorship W1964128673A5066869827 @default.
- W1964128673 hasConcept C108225325 @default.
- W1964128673 hasConcept C111548154 @default.
- W1964128673 hasConcept C127413603 @default.
- W1964128673 hasConcept C151730666 @default.
- W1964128673 hasConcept C159985019 @default.
- W1964128673 hasConcept C160671074 @default.
- W1964128673 hasConcept C171250308 @default.
- W1964128673 hasConcept C183866003 @default.
- W1964128673 hasConcept C19067145 @default.
- W1964128673 hasConcept C192562407 @default.
- W1964128673 hasConcept C2779227376 @default.
- W1964128673 hasConcept C2780565262 @default.
- W1964128673 hasConcept C2816523 @default.
- W1964128673 hasConcept C42360764 @default.
- W1964128673 hasConcept C49040817 @default.
- W1964128673 hasConcept C544956773 @default.
- W1964128673 hasConcept C57410435 @default.
- W1964128673 hasConcept C64297162 @default.
- W1964128673 hasConcept C75937256 @default.
- W1964128673 hasConcept C7770020 @default.
- W1964128673 hasConcept C86803240 @default.
- W1964128673 hasConcept C87359718 @default.
- W1964128673 hasConceptScore W1964128673C108225325 @default.
- W1964128673 hasConceptScore W1964128673C111548154 @default.
- W1964128673 hasConceptScore W1964128673C127413603 @default.
- W1964128673 hasConceptScore W1964128673C151730666 @default.
- W1964128673 hasConceptScore W1964128673C159985019 @default.
- W1964128673 hasConceptScore W1964128673C160671074 @default.
- W1964128673 hasConceptScore W1964128673C171250308 @default.
- W1964128673 hasConceptScore W1964128673C183866003 @default.
- W1964128673 hasConceptScore W1964128673C19067145 @default.
- W1964128673 hasConceptScore W1964128673C192562407 @default.
- W1964128673 hasConceptScore W1964128673C2779227376 @default.
- W1964128673 hasConceptScore W1964128673C2780565262 @default.
- W1964128673 hasConceptScore W1964128673C2816523 @default.
- W1964128673 hasConceptScore W1964128673C42360764 @default.
- W1964128673 hasConceptScore W1964128673C49040817 @default.
- W1964128673 hasConceptScore W1964128673C544956773 @default.
- W1964128673 hasConceptScore W1964128673C57410435 @default.
- W1964128673 hasConceptScore W1964128673C64297162 @default.
- W1964128673 hasConceptScore W1964128673C75937256 @default.
- W1964128673 hasConceptScore W1964128673C7770020 @default.
- W1964128673 hasConceptScore W1964128673C86803240 @default.
- W1964128673 hasConceptScore W1964128673C87359718 @default.
- W1964128673 hasIssue "2" @default.
- W1964128673 hasLocation W19641286731 @default.
- W1964128673 hasOpenAccess W1964128673 @default.
- W1964128673 hasPrimaryLocation W19641286731 @default.
- W1964128673 hasRelatedWork W1970686540 @default.
- W1964128673 hasRelatedWork W2016033341 @default.
- W1964128673 hasRelatedWork W2040724195 @default.
- W1964128673 hasRelatedWork W2373461737 @default.
- W1964128673 hasRelatedWork W2380305424 @default.
- W1964128673 hasRelatedWork W2591643851 @default.
- W1964128673 hasRelatedWork W3177905752 @default.
- W1964128673 hasRelatedWork W3181054684 @default.
- W1964128673 hasRelatedWork W330653193 @default.
- W1964128673 hasRelatedWork W1485099225 @default.
- W1964128673 hasVolume "11" @default.
- W1964128673 isParatext "false" @default.
- W1964128673 isRetracted "false" @default.
- W1964128673 magId "1964128673" @default.
- W1964128673 workType "article" @default.