Matches in SemOpenAlex for { <https://semopenalex.org/work/W1969238189> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W1969238189 endingPage "148" @default.
- W1969238189 startingPage "139" @default.
- W1969238189 created "2016-06-24" @default.
- W1969238189 creator A5010729277 @default.
- W1969238189 creator A5045599683 @default.
- W1969238189 creator A5045857059 @default.
- W1969238189 creator A5051689842 @default.
- W1969238189 creator A5085687046 @default.
- W1969238189 date "1988-03-01" @default.
- W1969238189 modified "2023-10-06" @default.
- W1969238189 title "Cross-sectional TEM characterization of low temperature (750-800°C) epitaxial silicon by very low pressure (6 mTorr) chemical vapor deposition with and without plasma enhancement" @default.
- W1969238189 cites W2018103861 @default.
- W1969238189 cites W2037795122 @default.
- W1969238189 cites W2057259454 @default.
- W1969238189 cites W2073114128 @default.
- W1969238189 cites W2073666531 @default.
- W1969238189 cites W2082249047 @default.
- W1969238189 doi "https://doi.org/10.1007/bf02652144" @default.
- W1969238189 hasPublicationYear "1988" @default.
- W1969238189 type Work @default.
- W1969238189 sameAs 1969238189 @default.
- W1969238189 citedByCount "5" @default.
- W1969238189 crossrefType "journal-article" @default.
- W1969238189 hasAuthorship W1969238189A5010729277 @default.
- W1969238189 hasAuthorship W1969238189A5045599683 @default.
- W1969238189 hasAuthorship W1969238189A5045857059 @default.
- W1969238189 hasAuthorship W1969238189A5051689842 @default.
- W1969238189 hasAuthorship W1969238189A5085687046 @default.
- W1969238189 hasConcept C110738630 @default.
- W1969238189 hasConcept C111368507 @default.
- W1969238189 hasConcept C113196181 @default.
- W1969238189 hasConcept C121332964 @default.
- W1969238189 hasConcept C127313418 @default.
- W1969238189 hasConcept C146088050 @default.
- W1969238189 hasConcept C159985019 @default.
- W1969238189 hasConcept C161368742 @default.
- W1969238189 hasConcept C171250308 @default.
- W1969238189 hasConcept C185592680 @default.
- W1969238189 hasConcept C19067145 @default.
- W1969238189 hasConcept C192562407 @default.
- W1969238189 hasConcept C22423302 @default.
- W1969238189 hasConcept C2777289219 @default.
- W1969238189 hasConcept C2777855556 @default.
- W1969238189 hasConcept C2779227376 @default.
- W1969238189 hasConcept C30646810 @default.
- W1969238189 hasConcept C38347018 @default.
- W1969238189 hasConcept C43617362 @default.
- W1969238189 hasConcept C49040817 @default.
- W1969238189 hasConcept C544956773 @default.
- W1969238189 hasConcept C57410435 @default.
- W1969238189 hasConcept C97355855 @default.
- W1969238189 hasConceptScore W1969238189C110738630 @default.
- W1969238189 hasConceptScore W1969238189C111368507 @default.
- W1969238189 hasConceptScore W1969238189C113196181 @default.
- W1969238189 hasConceptScore W1969238189C121332964 @default.
- W1969238189 hasConceptScore W1969238189C127313418 @default.
- W1969238189 hasConceptScore W1969238189C146088050 @default.
- W1969238189 hasConceptScore W1969238189C159985019 @default.
- W1969238189 hasConceptScore W1969238189C161368742 @default.
- W1969238189 hasConceptScore W1969238189C171250308 @default.
- W1969238189 hasConceptScore W1969238189C185592680 @default.
- W1969238189 hasConceptScore W1969238189C19067145 @default.
- W1969238189 hasConceptScore W1969238189C192562407 @default.
- W1969238189 hasConceptScore W1969238189C22423302 @default.
- W1969238189 hasConceptScore W1969238189C2777289219 @default.
- W1969238189 hasConceptScore W1969238189C2777855556 @default.
- W1969238189 hasConceptScore W1969238189C2779227376 @default.
- W1969238189 hasConceptScore W1969238189C30646810 @default.
- W1969238189 hasConceptScore W1969238189C38347018 @default.
- W1969238189 hasConceptScore W1969238189C43617362 @default.
- W1969238189 hasConceptScore W1969238189C49040817 @default.
- W1969238189 hasConceptScore W1969238189C544956773 @default.
- W1969238189 hasConceptScore W1969238189C57410435 @default.
- W1969238189 hasConceptScore W1969238189C97355855 @default.
- W1969238189 hasIssue "2" @default.
- W1969238189 hasLocation W19692381891 @default.
- W1969238189 hasOpenAccess W1969238189 @default.
- W1969238189 hasPrimaryLocation W19692381891 @default.
- W1969238189 hasRelatedWork W1485660136 @default.
- W1969238189 hasRelatedWork W1894752636 @default.
- W1969238189 hasRelatedWork W1968446622 @default.
- W1969238189 hasRelatedWork W1975050066 @default.
- W1969238189 hasRelatedWork W2042806425 @default.
- W1969238189 hasRelatedWork W2046111010 @default.
- W1969238189 hasRelatedWork W2057380465 @default.
- W1969238189 hasRelatedWork W2064142761 @default.
- W1969238189 hasRelatedWork W2154780082 @default.
- W1969238189 hasRelatedWork W2368756948 @default.
- W1969238189 hasVolume "17" @default.
- W1969238189 isParatext "false" @default.
- W1969238189 isRetracted "false" @default.
- W1969238189 magId "1969238189" @default.
- W1969238189 workType "article" @default.