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- W1973994986 created "2016-06-24" @default.
- W1973994986 creator A5019173030 @default.
- W1973994986 creator A5073414370 @default.
- W1973994986 date "2000-09-01" @default.
- W1973994986 modified "2023-09-23" @default.
- W1973994986 title "Fabrication of 0.5-μm structures by dry electron lithography and anisotropic plasma etching" @default.
- W1973994986 cites W1990577536 @default.
- W1973994986 cites W2005573976 @default.
- W1973994986 cites W2030347403 @default.
- W1973994986 cites W2046217945 @default.
- W1973994986 cites W2081116854 @default.
- W1973994986 cites W2088029685 @default.
- W1973994986 cites W2091889170 @default.
- W1973994986 cites W4236566899 @default.
- W1973994986 cites W2041329042 @default.
- W1973994986 doi "https://doi.org/10.1007/bf02773282" @default.
- W1973994986 hasPublicationYear "2000" @default.
- W1973994986 type Work @default.
- W1973994986 sameAs 1973994986 @default.
- W1973994986 citedByCount "0" @default.
- W1973994986 crossrefType "journal-article" @default.
- W1973994986 hasAuthorship W1973994986A5019173030 @default.
- W1973994986 hasAuthorship W1973994986A5073414370 @default.
- W1973994986 hasConcept C100460472 @default.
- W1973994986 hasConcept C107187091 @default.
- W1973994986 hasConcept C120665830 @default.
- W1973994986 hasConcept C121332964 @default.
- W1973994986 hasConcept C1291036 @default.
- W1973994986 hasConcept C130472188 @default.
- W1973994986 hasConcept C136525101 @default.
- W1973994986 hasConcept C142724271 @default.
- W1973994986 hasConcept C147120987 @default.
- W1973994986 hasConcept C171250308 @default.
- W1973994986 hasConcept C191897082 @default.
- W1973994986 hasConcept C192562407 @default.
- W1973994986 hasConcept C200274948 @default.
- W1973994986 hasConcept C204223013 @default.
- W1973994986 hasConcept C204787440 @default.
- W1973994986 hasConcept C2779227376 @default.
- W1973994986 hasConcept C2779851234 @default.
- W1973994986 hasConcept C49040817 @default.
- W1973994986 hasConcept C53524968 @default.
- W1973994986 hasConcept C544956773 @default.
- W1973994986 hasConcept C62520636 @default.
- W1973994986 hasConcept C71924100 @default.
- W1973994986 hasConcept C82706917 @default.
- W1973994986 hasConcept C85725439 @default.
- W1973994986 hasConcept C95312477 @default.
- W1973994986 hasConceptScore W1973994986C100460472 @default.
- W1973994986 hasConceptScore W1973994986C107187091 @default.
- W1973994986 hasConceptScore W1973994986C120665830 @default.
- W1973994986 hasConceptScore W1973994986C121332964 @default.
- W1973994986 hasConceptScore W1973994986C1291036 @default.
- W1973994986 hasConceptScore W1973994986C130472188 @default.
- W1973994986 hasConceptScore W1973994986C136525101 @default.
- W1973994986 hasConceptScore W1973994986C142724271 @default.
- W1973994986 hasConceptScore W1973994986C147120987 @default.
- W1973994986 hasConceptScore W1973994986C171250308 @default.
- W1973994986 hasConceptScore W1973994986C191897082 @default.
- W1973994986 hasConceptScore W1973994986C192562407 @default.
- W1973994986 hasConceptScore W1973994986C200274948 @default.
- W1973994986 hasConceptScore W1973994986C204223013 @default.
- W1973994986 hasConceptScore W1973994986C204787440 @default.
- W1973994986 hasConceptScore W1973994986C2779227376 @default.
- W1973994986 hasConceptScore W1973994986C2779851234 @default.
- W1973994986 hasConceptScore W1973994986C49040817 @default.
- W1973994986 hasConceptScore W1973994986C53524968 @default.
- W1973994986 hasConceptScore W1973994986C544956773 @default.
- W1973994986 hasConceptScore W1973994986C62520636 @default.
- W1973994986 hasConceptScore W1973994986C71924100 @default.
- W1973994986 hasConceptScore W1973994986C82706917 @default.
- W1973994986 hasConceptScore W1973994986C85725439 @default.
- W1973994986 hasConceptScore W1973994986C95312477 @default.
- W1973994986 hasLocation W19739949861 @default.
- W1973994986 hasOpenAccess W1973994986 @default.
- W1973994986 hasPrimaryLocation W19739949861 @default.
- W1973994986 hasRelatedWork W1983925576 @default.
- W1973994986 hasRelatedWork W1986081218 @default.
- W1973994986 hasRelatedWork W1993620123 @default.
- W1973994986 hasRelatedWork W1995646698 @default.
- W1973994986 hasRelatedWork W2009648914 @default.
- W1973994986 hasRelatedWork W2014136431 @default.
- W1973994986 hasRelatedWork W2028463028 @default.
- W1973994986 hasRelatedWork W2041550169 @default.
- W1973994986 hasRelatedWork W2043584114 @default.
- W1973994986 hasRelatedWork W2061406396 @default.
- W1973994986 hasRelatedWork W2063836410 @default.
- W1973994986 hasRelatedWork W2066110246 @default.
- W1973994986 hasRelatedWork W2071317332 @default.
- W1973994986 hasRelatedWork W2077035481 @default.
- W1973994986 hasRelatedWork W2092478901 @default.
- W1973994986 hasRelatedWork W2104078442 @default.
- W1973994986 hasRelatedWork W2748603911 @default.
- W1973994986 hasRelatedWork W2793122742 @default.
- W1973994986 hasRelatedWork W2963856432 @default.
- W1973994986 hasRelatedWork W2467434186 @default.
- W1973994986 isParatext "false" @default.
- W1973994986 isRetracted "false" @default.
- W1973994986 magId "1973994986" @default.
- W1973994986 workType "article" @default.