Matches in SemOpenAlex for { <https://semopenalex.org/work/W1976244706> ?p ?o ?g. }
- W1976244706 endingPage "1048" @default.
- W1976244706 startingPage "1042" @default.
- W1976244706 created "2016-06-24" @default.
- W1976244706 creator A5019430368 @default.
- W1976244706 creator A5027047228 @default.
- W1976244706 creator A5049454701 @default.
- W1976244706 creator A5058022542 @default.
- W1976244706 creator A5086491706 @default.
- W1976244706 creator A5090782096 @default.
- W1976244706 date "2001-08-01" @default.
- W1976244706 modified "2023-10-14" @default.
- W1976244706 title "Microstructure control of copper films by the addition of molybdenum in an advanced metallization process" @default.
- W1976244706 cites W1966461430 @default.
- W1976244706 cites W1966970285 @default.
- W1976244706 cites W1969419081 @default.
- W1976244706 cites W1973947465 @default.
- W1976244706 cites W1974488912 @default.
- W1976244706 cites W1982049242 @default.
- W1976244706 cites W1994805091 @default.
- W1976244706 cites W1995608017 @default.
- W1976244706 cites W1996215822 @default.
- W1976244706 cites W1999518923 @default.
- W1976244706 cites W2001230957 @default.
- W1976244706 cites W2002063015 @default.
- W1976244706 cites W2008984953 @default.
- W1976244706 cites W2019501855 @default.
- W1976244706 cites W2020243835 @default.
- W1976244706 cites W2020812919 @default.
- W1976244706 cites W2035218557 @default.
- W1976244706 cites W2044851999 @default.
- W1976244706 cites W2045175736 @default.
- W1976244706 cites W2046272941 @default.
- W1976244706 cites W2066301944 @default.
- W1976244706 cites W2070224591 @default.
- W1976244706 cites W2073456519 @default.
- W1976244706 cites W2090721423 @default.
- W1976244706 cites W2090761023 @default.
- W1976244706 cites W3158452420 @default.
- W1976244706 doi "https://doi.org/10.1007/bf02657730" @default.
- W1976244706 hasPublicationYear "2001" @default.
- W1976244706 type Work @default.
- W1976244706 sameAs 1976244706 @default.
- W1976244706 citedByCount "9" @default.
- W1976244706 countsByYear W19762447062014 @default.
- W1976244706 countsByYear W19762447062016 @default.
- W1976244706 countsByYear W19762447062018 @default.
- W1976244706 crossrefType "journal-article" @default.
- W1976244706 hasAuthorship W1976244706A5019430368 @default.
- W1976244706 hasAuthorship W1976244706A5027047228 @default.
- W1976244706 hasAuthorship W1976244706A5049454701 @default.
- W1976244706 hasAuthorship W1976244706A5058022542 @default.
- W1976244706 hasAuthorship W1976244706A5086491706 @default.
- W1976244706 hasAuthorship W1976244706A5090782096 @default.
- W1976244706 hasConcept C150394285 @default.
- W1976244706 hasConcept C15696416 @default.
- W1976244706 hasConcept C159985019 @default.
- W1976244706 hasConcept C178790620 @default.
- W1976244706 hasConcept C185592680 @default.
- W1976244706 hasConcept C191897082 @default.
- W1976244706 hasConcept C192191005 @default.
- W1976244706 hasConcept C192562407 @default.
- W1976244706 hasConcept C2777855556 @default.
- W1976244706 hasConcept C2778836790 @default.
- W1976244706 hasConcept C2779227376 @default.
- W1976244706 hasConcept C47908070 @default.
- W1976244706 hasConcept C544778455 @default.
- W1976244706 hasConcept C549387045 @default.
- W1976244706 hasConcept C87976508 @default.
- W1976244706 hasConcept C98390173 @default.
- W1976244706 hasConceptScore W1976244706C150394285 @default.
- W1976244706 hasConceptScore W1976244706C15696416 @default.
- W1976244706 hasConceptScore W1976244706C159985019 @default.
- W1976244706 hasConceptScore W1976244706C178790620 @default.
- W1976244706 hasConceptScore W1976244706C185592680 @default.
- W1976244706 hasConceptScore W1976244706C191897082 @default.
- W1976244706 hasConceptScore W1976244706C192191005 @default.
- W1976244706 hasConceptScore W1976244706C192562407 @default.
- W1976244706 hasConceptScore W1976244706C2777855556 @default.
- W1976244706 hasConceptScore W1976244706C2778836790 @default.
- W1976244706 hasConceptScore W1976244706C2779227376 @default.
- W1976244706 hasConceptScore W1976244706C47908070 @default.
- W1976244706 hasConceptScore W1976244706C544778455 @default.
- W1976244706 hasConceptScore W1976244706C549387045 @default.
- W1976244706 hasConceptScore W1976244706C87976508 @default.
- W1976244706 hasConceptScore W1976244706C98390173 @default.
- W1976244706 hasIssue "8" @default.
- W1976244706 hasLocation W19762447061 @default.
- W1976244706 hasOpenAccess W1976244706 @default.
- W1976244706 hasPrimaryLocation W19762447061 @default.
- W1976244706 hasRelatedWork W1527811812 @default.
- W1976244706 hasRelatedWork W2049227956 @default.
- W1976244706 hasRelatedWork W2052385537 @default.
- W1976244706 hasRelatedWork W2057932623 @default.
- W1976244706 hasRelatedWork W2087317069 @default.
- W1976244706 hasRelatedWork W2368850847 @default.
- W1976244706 hasRelatedWork W2370281718 @default.
- W1976244706 hasRelatedWork W2606509029 @default.
- W1976244706 hasRelatedWork W3157771067 @default.
- W1976244706 hasRelatedWork W591702546 @default.
- W1976244706 hasVolume "30" @default.