Matches in SemOpenAlex for { <https://semopenalex.org/work/W1979286087> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W1979286087 created "2016-06-24" @default.
- W1979286087 creator A5001429131 @default.
- W1979286087 creator A5035348825 @default.
- W1979286087 creator A5070523267 @default.
- W1979286087 date "2000-01-01" @default.
- W1979286087 modified "2023-09-23" @default.
- W1979286087 title "Ion-Assisted Deposition of Silicon Epitaxial Films with High Deposition Rate Using Low Energy Silicon Ions" @default.
- W1979286087 cites W1989526770 @default.
- W1979286087 cites W1993836738 @default.
- W1979286087 cites W2019909067 @default.
- W1979286087 cites W2029872799 @default.
- W1979286087 cites W2035492164 @default.
- W1979286087 cites W2049882705 @default.
- W1979286087 cites W2078403497 @default.
- W1979286087 cites W2081138137 @default.
- W1979286087 cites W2087783518 @default.
- W1979286087 cites W2145549886 @default.
- W1979286087 cites W2233687764 @default.
- W1979286087 doi "https://doi.org/10.1557/proc-609-a7.1" @default.
- W1979286087 hasPublicationYear "2000" @default.
- W1979286087 type Work @default.
- W1979286087 sameAs 1979286087 @default.
- W1979286087 citedByCount "5" @default.
- W1979286087 crossrefType "journal-article" @default.
- W1979286087 hasAuthorship W1979286087A5001429131 @default.
- W1979286087 hasAuthorship W1979286087A5035348825 @default.
- W1979286087 hasAuthorship W1979286087A5070523267 @default.
- W1979286087 hasConcept C100460472 @default.
- W1979286087 hasConcept C110738630 @default.
- W1979286087 hasConcept C111368507 @default.
- W1979286087 hasConcept C127313418 @default.
- W1979286087 hasConcept C137637335 @default.
- W1979286087 hasConcept C151730666 @default.
- W1979286087 hasConcept C171250308 @default.
- W1979286087 hasConcept C191897082 @default.
- W1979286087 hasConcept C192562407 @default.
- W1979286087 hasConcept C26953177 @default.
- W1979286087 hasConcept C2777289219 @default.
- W1979286087 hasConcept C2779227376 @default.
- W1979286087 hasConcept C2780565262 @default.
- W1979286087 hasConcept C2816523 @default.
- W1979286087 hasConcept C49040817 @default.
- W1979286087 hasConcept C544956773 @default.
- W1979286087 hasConcept C64297162 @default.
- W1979286087 hasConcept C86803240 @default.
- W1979286087 hasConcept C87359718 @default.
- W1979286087 hasConceptScore W1979286087C100460472 @default.
- W1979286087 hasConceptScore W1979286087C110738630 @default.
- W1979286087 hasConceptScore W1979286087C111368507 @default.
- W1979286087 hasConceptScore W1979286087C127313418 @default.
- W1979286087 hasConceptScore W1979286087C137637335 @default.
- W1979286087 hasConceptScore W1979286087C151730666 @default.
- W1979286087 hasConceptScore W1979286087C171250308 @default.
- W1979286087 hasConceptScore W1979286087C191897082 @default.
- W1979286087 hasConceptScore W1979286087C192562407 @default.
- W1979286087 hasConceptScore W1979286087C26953177 @default.
- W1979286087 hasConceptScore W1979286087C2777289219 @default.
- W1979286087 hasConceptScore W1979286087C2779227376 @default.
- W1979286087 hasConceptScore W1979286087C2780565262 @default.
- W1979286087 hasConceptScore W1979286087C2816523 @default.
- W1979286087 hasConceptScore W1979286087C49040817 @default.
- W1979286087 hasConceptScore W1979286087C544956773 @default.
- W1979286087 hasConceptScore W1979286087C64297162 @default.
- W1979286087 hasConceptScore W1979286087C86803240 @default.
- W1979286087 hasConceptScore W1979286087C87359718 @default.
- W1979286087 hasLocation W19792860871 @default.
- W1979286087 hasOpenAccess W1979286087 @default.
- W1979286087 hasPrimaryLocation W19792860871 @default.
- W1979286087 hasRelatedWork W123796606 @default.
- W1979286087 hasRelatedWork W1553019763 @default.
- W1979286087 hasRelatedWork W1564708439 @default.
- W1979286087 hasRelatedWork W1919697428 @default.
- W1979286087 hasRelatedWork W1975463971 @default.
- W1979286087 hasRelatedWork W1986489532 @default.
- W1979286087 hasRelatedWork W2070363201 @default.
- W1979286087 hasRelatedWork W2085411115 @default.
- W1979286087 hasRelatedWork W2089398907 @default.
- W1979286087 hasRelatedWork W4298141417 @default.
- W1979286087 hasVolume "609" @default.
- W1979286087 isParatext "false" @default.
- W1979286087 isRetracted "false" @default.
- W1979286087 magId "1979286087" @default.
- W1979286087 workType "article" @default.