Matches in SemOpenAlex for { <https://semopenalex.org/work/W1986958151> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W1986958151 endingPage "537" @default.
- W1986958151 startingPage "537" @default.
- W1986958151 created "2016-06-24" @default.
- W1986958151 creator A5039961696 @default.
- W1986958151 date "1972-12-01" @default.
- W1986958151 modified "2023-09-27" @default.
- W1986958151 title "A simple cure for a form of window staining which occurs during the etching of silicon integrated circuits" @default.
- W1986958151 doi "https://doi.org/10.1016/0026-2714(72)90116-3" @default.
- W1986958151 hasPublicationYear "1972" @default.
- W1986958151 type Work @default.
- W1986958151 sameAs 1986958151 @default.
- W1986958151 citedByCount "2" @default.
- W1986958151 crossrefType "journal-article" @default.
- W1986958151 hasAuthorship W1986958151A5039961696 @default.
- W1986958151 hasConcept C100460472 @default.
- W1986958151 hasConcept C111472728 @default.
- W1986958151 hasConcept C111919701 @default.
- W1986958151 hasConcept C119599485 @default.
- W1986958151 hasConcept C127413603 @default.
- W1986958151 hasConcept C134146338 @default.
- W1986958151 hasConcept C138885662 @default.
- W1986958151 hasConcept C171250308 @default.
- W1986958151 hasConcept C192562407 @default.
- W1986958151 hasConcept C24326235 @default.
- W1986958151 hasConcept C2778751112 @default.
- W1986958151 hasConcept C2779227376 @default.
- W1986958151 hasConcept C2780586882 @default.
- W1986958151 hasConcept C41008148 @default.
- W1986958151 hasConcept C49040817 @default.
- W1986958151 hasConcept C530198007 @default.
- W1986958151 hasConcept C54355233 @default.
- W1986958151 hasConcept C544956773 @default.
- W1986958151 hasConcept C74864618 @default.
- W1986958151 hasConcept C86803240 @default.
- W1986958151 hasConceptScore W1986958151C100460472 @default.
- W1986958151 hasConceptScore W1986958151C111472728 @default.
- W1986958151 hasConceptScore W1986958151C111919701 @default.
- W1986958151 hasConceptScore W1986958151C119599485 @default.
- W1986958151 hasConceptScore W1986958151C127413603 @default.
- W1986958151 hasConceptScore W1986958151C134146338 @default.
- W1986958151 hasConceptScore W1986958151C138885662 @default.
- W1986958151 hasConceptScore W1986958151C171250308 @default.
- W1986958151 hasConceptScore W1986958151C192562407 @default.
- W1986958151 hasConceptScore W1986958151C24326235 @default.
- W1986958151 hasConceptScore W1986958151C2778751112 @default.
- W1986958151 hasConceptScore W1986958151C2779227376 @default.
- W1986958151 hasConceptScore W1986958151C2780586882 @default.
- W1986958151 hasConceptScore W1986958151C41008148 @default.
- W1986958151 hasConceptScore W1986958151C49040817 @default.
- W1986958151 hasConceptScore W1986958151C530198007 @default.
- W1986958151 hasConceptScore W1986958151C54355233 @default.
- W1986958151 hasConceptScore W1986958151C544956773 @default.
- W1986958151 hasConceptScore W1986958151C74864618 @default.
- W1986958151 hasConceptScore W1986958151C86803240 @default.
- W1986958151 hasIssue "6" @default.
- W1986958151 hasLocation W19869581511 @default.
- W1986958151 hasOpenAccess W1986958151 @default.
- W1986958151 hasPrimaryLocation W19869581511 @default.
- W1986958151 hasRelatedWork W2044998571 @default.
- W1986958151 hasRelatedWork W2075308121 @default.
- W1986958151 hasRelatedWork W2121226886 @default.
- W1986958151 hasRelatedWork W2126680276 @default.
- W1986958151 hasRelatedWork W2137311846 @default.
- W1986958151 hasRelatedWork W2161666177 @default.
- W1986958151 hasRelatedWork W2333339656 @default.
- W1986958151 hasRelatedWork W2505047140 @default.
- W1986958151 hasRelatedWork W4321317699 @default.
- W1986958151 hasRelatedWork W4321521012 @default.
- W1986958151 hasVolume "11" @default.
- W1986958151 isParatext "false" @default.
- W1986958151 isRetracted "false" @default.
- W1986958151 magId "1986958151" @default.
- W1986958151 workType "article" @default.