Matches in SemOpenAlex for { <https://semopenalex.org/work/W1988060445> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W1988060445 endingPage "1429" @default.
- W1988060445 startingPage "1421" @default.
- W1988060445 created "2016-06-24" @default.
- W1988060445 creator A5050291128 @default.
- W1988060445 creator A5060134814 @default.
- W1988060445 date "1992-08-01" @default.
- W1988060445 modified "2023-09-25" @default.
- W1988060445 title "Remote plasma chemical vapour deposition of silicon nitride films" @default.
- W1988060445 doi "https://doi.org/10.1051/jp3:1992186" @default.
- W1988060445 hasPublicationYear "1992" @default.
- W1988060445 type Work @default.
- W1988060445 sameAs 1988060445 @default.
- W1988060445 citedByCount "1" @default.
- W1988060445 crossrefType "journal-article" @default.
- W1988060445 hasAuthorship W1988060445A5050291128 @default.
- W1988060445 hasAuthorship W1988060445A5060134814 @default.
- W1988060445 hasBestOaLocation W19880604452 @default.
- W1988060445 hasConcept C121332964 @default.
- W1988060445 hasConcept C127313418 @default.
- W1988060445 hasConcept C127413603 @default.
- W1988060445 hasConcept C151730666 @default.
- W1988060445 hasConcept C171250308 @default.
- W1988060445 hasConcept C185544564 @default.
- W1988060445 hasConcept C192562407 @default.
- W1988060445 hasConcept C194760766 @default.
- W1988060445 hasConcept C2777431650 @default.
- W1988060445 hasConcept C2779227376 @default.
- W1988060445 hasConcept C2780740191 @default.
- W1988060445 hasConcept C2816523 @default.
- W1988060445 hasConcept C38347018 @default.
- W1988060445 hasConcept C42360764 @default.
- W1988060445 hasConcept C49040817 @default.
- W1988060445 hasConcept C544956773 @default.
- W1988060445 hasConcept C57410435 @default.
- W1988060445 hasConcept C64297162 @default.
- W1988060445 hasConcept C82706917 @default.
- W1988060445 hasConceptScore W1988060445C121332964 @default.
- W1988060445 hasConceptScore W1988060445C127313418 @default.
- W1988060445 hasConceptScore W1988060445C127413603 @default.
- W1988060445 hasConceptScore W1988060445C151730666 @default.
- W1988060445 hasConceptScore W1988060445C171250308 @default.
- W1988060445 hasConceptScore W1988060445C185544564 @default.
- W1988060445 hasConceptScore W1988060445C192562407 @default.
- W1988060445 hasConceptScore W1988060445C194760766 @default.
- W1988060445 hasConceptScore W1988060445C2777431650 @default.
- W1988060445 hasConceptScore W1988060445C2779227376 @default.
- W1988060445 hasConceptScore W1988060445C2780740191 @default.
- W1988060445 hasConceptScore W1988060445C2816523 @default.
- W1988060445 hasConceptScore W1988060445C38347018 @default.
- W1988060445 hasConceptScore W1988060445C42360764 @default.
- W1988060445 hasConceptScore W1988060445C49040817 @default.
- W1988060445 hasConceptScore W1988060445C544956773 @default.
- W1988060445 hasConceptScore W1988060445C57410435 @default.
- W1988060445 hasConceptScore W1988060445C64297162 @default.
- W1988060445 hasConceptScore W1988060445C82706917 @default.
- W1988060445 hasIssue "8" @default.
- W1988060445 hasLocation W19880604451 @default.
- W1988060445 hasLocation W19880604452 @default.
- W1988060445 hasLocation W19880604453 @default.
- W1988060445 hasOpenAccess W1988060445 @default.
- W1988060445 hasPrimaryLocation W19880604451 @default.
- W1988060445 hasRelatedWork W2010769555 @default.
- W1988060445 hasRelatedWork W2042245115 @default.
- W1988060445 hasRelatedWork W2045479671 @default.
- W1988060445 hasRelatedWork W2047901069 @default.
- W1988060445 hasRelatedWork W2062481960 @default.
- W1988060445 hasRelatedWork W2096859142 @default.
- W1988060445 hasRelatedWork W2119730802 @default.
- W1988060445 hasRelatedWork W2120835426 @default.
- W1988060445 hasRelatedWork W2511137766 @default.
- W1988060445 hasRelatedWork W2152946510 @default.
- W1988060445 hasVolume "2" @default.
- W1988060445 isParatext "false" @default.
- W1988060445 isRetracted "false" @default.
- W1988060445 magId "1988060445" @default.
- W1988060445 workType "article" @default.