Matches in SemOpenAlex for { <https://semopenalex.org/work/W1990996865> ?p ?o ?g. }
- W1990996865 endingPage "184" @default.
- W1990996865 startingPage "177" @default.
- W1990996865 created "2016-06-24" @default.
- W1990996865 creator A5004326219 @default.
- W1990996865 creator A5010026629 @default.
- W1990996865 creator A5063407565 @default.
- W1990996865 creator A5080723487 @default.
- W1990996865 date "2013-02-08" @default.
- W1990996865 modified "2023-09-23" @default.
- W1990996865 title "Tribo-chemical Behavior of Copper in Chemical Mechanical Planarization" @default.
- W1990996865 cites W1880043260 @default.
- W1990996865 cites W1960255279 @default.
- W1990996865 cites W1970517121 @default.
- W1990996865 cites W1973553421 @default.
- W1990996865 cites W1983762425 @default.
- W1990996865 cites W1987076186 @default.
- W1990996865 cites W1987120177 @default.
- W1990996865 cites W1996200409 @default.
- W1990996865 cites W2005594174 @default.
- W1990996865 cites W2005709705 @default.
- W1990996865 cites W2010347412 @default.
- W1990996865 cites W2025128213 @default.
- W1990996865 cites W2035632632 @default.
- W1990996865 cites W2037928865 @default.
- W1990996865 cites W2038118380 @default.
- W1990996865 cites W2049746993 @default.
- W1990996865 cites W2058932080 @default.
- W1990996865 cites W2066695916 @default.
- W1990996865 cites W2069267024 @default.
- W1990996865 cites W2078722259 @default.
- W1990996865 cites W2081024800 @default.
- W1990996865 cites W2085933054 @default.
- W1990996865 cites W2094561489 @default.
- W1990996865 cites W2097519580 @default.
- W1990996865 cites W2110937551 @default.
- W1990996865 cites W2139371931 @default.
- W1990996865 cites W2078463718 @default.
- W1990996865 doi "https://doi.org/10.1007/s11249-013-0110-5" @default.
- W1990996865 hasPublicationYear "2013" @default.
- W1990996865 type Work @default.
- W1990996865 sameAs 1990996865 @default.
- W1990996865 citedByCount "11" @default.
- W1990996865 countsByYear W19909968652014 @default.
- W1990996865 countsByYear W19909968652015 @default.
- W1990996865 countsByYear W19909968652016 @default.
- W1990996865 countsByYear W19909968652018 @default.
- W1990996865 countsByYear W19909968652020 @default.
- W1990996865 countsByYear W19909968652022 @default.
- W1990996865 crossrefType "journal-article" @default.
- W1990996865 hasAuthorship W1990996865A5004326219 @default.
- W1990996865 hasAuthorship W1990996865A5010026629 @default.
- W1990996865 hasAuthorship W1990996865A5063407565 @default.
- W1990996865 hasAuthorship W1990996865A5080723487 @default.
- W1990996865 hasConcept C102404424 @default.
- W1990996865 hasConcept C118231568 @default.
- W1990996865 hasConcept C120665830 @default.
- W1990996865 hasConcept C121332964 @default.
- W1990996865 hasConcept C127413603 @default.
- W1990996865 hasConcept C138113353 @default.
- W1990996865 hasConcept C147789679 @default.
- W1990996865 hasConcept C159985019 @default.
- W1990996865 hasConcept C167310744 @default.
- W1990996865 hasConcept C168646106 @default.
- W1990996865 hasConcept C17525397 @default.
- W1990996865 hasConcept C175708663 @default.
- W1990996865 hasConcept C177801218 @default.
- W1990996865 hasConcept C180088628 @default.
- W1990996865 hasConcept C185592680 @default.
- W1990996865 hasConcept C191897082 @default.
- W1990996865 hasConcept C192562407 @default.
- W1990996865 hasConcept C20625102 @default.
- W1990996865 hasConcept C2779227376 @default.
- W1990996865 hasConcept C2780957350 @default.
- W1990996865 hasConcept C33574316 @default.
- W1990996865 hasConcept C40003534 @default.
- W1990996865 hasConcept C42360764 @default.
- W1990996865 hasConcept C52859227 @default.
- W1990996865 hasConcept C544778455 @default.
- W1990996865 hasConcept C55493867 @default.
- W1990996865 hasConcept C88380143 @default.
- W1990996865 hasConceptScore W1990996865C102404424 @default.
- W1990996865 hasConceptScore W1990996865C118231568 @default.
- W1990996865 hasConceptScore W1990996865C120665830 @default.
- W1990996865 hasConceptScore W1990996865C121332964 @default.
- W1990996865 hasConceptScore W1990996865C127413603 @default.
- W1990996865 hasConceptScore W1990996865C138113353 @default.
- W1990996865 hasConceptScore W1990996865C147789679 @default.
- W1990996865 hasConceptScore W1990996865C159985019 @default.
- W1990996865 hasConceptScore W1990996865C167310744 @default.
- W1990996865 hasConceptScore W1990996865C168646106 @default.
- W1990996865 hasConceptScore W1990996865C17525397 @default.
- W1990996865 hasConceptScore W1990996865C175708663 @default.
- W1990996865 hasConceptScore W1990996865C177801218 @default.
- W1990996865 hasConceptScore W1990996865C180088628 @default.
- W1990996865 hasConceptScore W1990996865C185592680 @default.
- W1990996865 hasConceptScore W1990996865C191897082 @default.
- W1990996865 hasConceptScore W1990996865C192562407 @default.
- W1990996865 hasConceptScore W1990996865C20625102 @default.
- W1990996865 hasConceptScore W1990996865C2779227376 @default.
- W1990996865 hasConceptScore W1990996865C2780957350 @default.