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- W1992991908 endingPage "444" @default.
- W1992991908 startingPage "C5" @default.
- W1992991908 created "2016-06-24" @default.
- W1992991908 creator A5000093858 @default.
- W1992991908 creator A5071014205 @default.
- W1992991908 creator A5072584653 @default.
- W1992991908 creator A5072781410 @default.
- W1992991908 date "1989-05-01" @default.
- W1992991908 modified "2023-10-18" @default.
- W1992991908 title "KINETICS OF THE CHEMICAL VAPOR DEPOSITION OF SILICON NITRIDE-FROM Si(CH3)4/ NH3/H2 GAS MIXTURES" @default.
- W1992991908 doi "https://doi.org/10.1051/jphyscol:1989555" @default.
- W1992991908 hasPublicationYear "1989" @default.
- W1992991908 type Work @default.
- W1992991908 sameAs 1992991908 @default.
- W1992991908 citedByCount "0" @default.
- W1992991908 crossrefType "journal-article" @default.
- W1992991908 hasAuthorship W1992991908A5000093858 @default.
- W1992991908 hasAuthorship W1992991908A5071014205 @default.
- W1992991908 hasAuthorship W1992991908A5072584653 @default.
- W1992991908 hasAuthorship W1992991908A5072781410 @default.
- W1992991908 hasBestOaLocation W19929919082 @default.
- W1992991908 hasConcept C107872376 @default.
- W1992991908 hasConcept C113196181 @default.
- W1992991908 hasConcept C121332964 @default.
- W1992991908 hasConcept C127413603 @default.
- W1992991908 hasConcept C148898269 @default.
- W1992991908 hasConcept C151730666 @default.
- W1992991908 hasConcept C171250308 @default.
- W1992991908 hasConcept C185592680 @default.
- W1992991908 hasConcept C191897082 @default.
- W1992991908 hasConcept C192562407 @default.
- W1992991908 hasConcept C194760766 @default.
- W1992991908 hasConcept C2777431650 @default.
- W1992991908 hasConcept C2779227376 @default.
- W1992991908 hasConcept C2816523 @default.
- W1992991908 hasConcept C38347018 @default.
- W1992991908 hasConcept C42360764 @default.
- W1992991908 hasConcept C544956773 @default.
- W1992991908 hasConcept C57410435 @default.
- W1992991908 hasConcept C62520636 @default.
- W1992991908 hasConcept C64297162 @default.
- W1992991908 hasConcept C86803240 @default.
- W1992991908 hasConceptScore W1992991908C107872376 @default.
- W1992991908 hasConceptScore W1992991908C113196181 @default.
- W1992991908 hasConceptScore W1992991908C121332964 @default.
- W1992991908 hasConceptScore W1992991908C127413603 @default.
- W1992991908 hasConceptScore W1992991908C148898269 @default.
- W1992991908 hasConceptScore W1992991908C151730666 @default.
- W1992991908 hasConceptScore W1992991908C171250308 @default.
- W1992991908 hasConceptScore W1992991908C185592680 @default.
- W1992991908 hasConceptScore W1992991908C191897082 @default.
- W1992991908 hasConceptScore W1992991908C192562407 @default.
- W1992991908 hasConceptScore W1992991908C194760766 @default.
- W1992991908 hasConceptScore W1992991908C2777431650 @default.
- W1992991908 hasConceptScore W1992991908C2779227376 @default.
- W1992991908 hasConceptScore W1992991908C2816523 @default.
- W1992991908 hasConceptScore W1992991908C38347018 @default.
- W1992991908 hasConceptScore W1992991908C42360764 @default.
- W1992991908 hasConceptScore W1992991908C544956773 @default.
- W1992991908 hasConceptScore W1992991908C57410435 @default.
- W1992991908 hasConceptScore W1992991908C62520636 @default.
- W1992991908 hasConceptScore W1992991908C64297162 @default.
- W1992991908 hasConceptScore W1992991908C86803240 @default.
- W1992991908 hasIssue "C5" @default.
- W1992991908 hasLocation W19929919081 @default.
- W1992991908 hasLocation W19929919082 @default.
- W1992991908 hasLocation W19929919083 @default.
- W1992991908 hasOpenAccess W1992991908 @default.
- W1992991908 hasPrimaryLocation W19929919081 @default.
- W1992991908 hasRelatedWork W2010769555 @default.
- W1992991908 hasRelatedWork W2036418505 @default.
- W1992991908 hasRelatedWork W2042245115 @default.
- W1992991908 hasRelatedWork W2047901069 @default.
- W1992991908 hasRelatedWork W2082824188 @default.
- W1992991908 hasRelatedWork W2119730802 @default.
- W1992991908 hasRelatedWork W2120835426 @default.
- W1992991908 hasRelatedWork W2511137766 @default.
- W1992991908 hasRelatedWork W3005463873 @default.
- W1992991908 hasRelatedWork W2152946510 @default.
- W1992991908 hasVolume "50" @default.
- W1992991908 isParatext "false" @default.
- W1992991908 isRetracted "false" @default.
- W1992991908 magId "1992991908" @default.
- W1992991908 workType "article" @default.