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- W2004560074 created "2016-06-24" @default.
- W2004560074 creator A5064868895 @default.
- W2004560074 date "1984-01-01" @default.
- W2004560074 modified "2023-10-01" @default.
- W2004560074 title "Dry Etching for Nanometer-Scale Fabrication" @default.
- W2004560074 cites W1970462492 @default.
- W2004560074 cites W1975617774 @default.
- W2004560074 cites W1980342469 @default.
- W2004560074 cites W2020575925 @default.
- W2004560074 cites W2037328774 @default.
- W2004560074 cites W2041521150 @default.
- W2004560074 cites W2047048769 @default.
- W2004560074 cites W2056494714 @default.
- W2004560074 cites W2067099917 @default.
- W2004560074 cites W2068984851 @default.
- W2004560074 cites W2085811395 @default.
- W2004560074 cites W2089746739 @default.
- W2004560074 cites W2107027415 @default.
- W2004560074 cites W2115689197 @default.
- W2004560074 cites W2153439483 @default.
- W2004560074 doi "https://doi.org/10.1557/proc-38-247" @default.
- W2004560074 hasPublicationYear "1984" @default.
- W2004560074 type Work @default.
- W2004560074 sameAs 2004560074 @default.
- W2004560074 citedByCount "1" @default.
- W2004560074 crossrefType "journal-article" @default.
- W2004560074 hasAuthorship W2004560074A5064868895 @default.
- W2004560074 hasConcept C100460472 @default.
- W2004560074 hasConcept C107187091 @default.
- W2004560074 hasConcept C108225325 @default.
- W2004560074 hasConcept C1291036 @default.
- W2004560074 hasConcept C130472188 @default.
- W2004560074 hasConcept C136525101 @default.
- W2004560074 hasConcept C142724271 @default.
- W2004560074 hasConcept C159985019 @default.
- W2004560074 hasConcept C171250308 @default.
- W2004560074 hasConcept C192562407 @default.
- W2004560074 hasConcept C200274948 @default.
- W2004560074 hasConcept C204223013 @default.
- W2004560074 hasConcept C204787440 @default.
- W2004560074 hasConcept C2779227376 @default.
- W2004560074 hasConcept C49040817 @default.
- W2004560074 hasConcept C527607 @default.
- W2004560074 hasConcept C53524968 @default.
- W2004560074 hasConcept C544956773 @default.
- W2004560074 hasConcept C71924100 @default.
- W2004560074 hasConcept C77066764 @default.
- W2004560074 hasConceptScore W2004560074C100460472 @default.
- W2004560074 hasConceptScore W2004560074C107187091 @default.
- W2004560074 hasConceptScore W2004560074C108225325 @default.
- W2004560074 hasConceptScore W2004560074C1291036 @default.
- W2004560074 hasConceptScore W2004560074C130472188 @default.
- W2004560074 hasConceptScore W2004560074C136525101 @default.
- W2004560074 hasConceptScore W2004560074C142724271 @default.
- W2004560074 hasConceptScore W2004560074C159985019 @default.
- W2004560074 hasConceptScore W2004560074C171250308 @default.
- W2004560074 hasConceptScore W2004560074C192562407 @default.
- W2004560074 hasConceptScore W2004560074C200274948 @default.
- W2004560074 hasConceptScore W2004560074C204223013 @default.
- W2004560074 hasConceptScore W2004560074C204787440 @default.
- W2004560074 hasConceptScore W2004560074C2779227376 @default.
- W2004560074 hasConceptScore W2004560074C49040817 @default.
- W2004560074 hasConceptScore W2004560074C527607 @default.
- W2004560074 hasConceptScore W2004560074C53524968 @default.
- W2004560074 hasConceptScore W2004560074C544956773 @default.
- W2004560074 hasConceptScore W2004560074C71924100 @default.
- W2004560074 hasConceptScore W2004560074C77066764 @default.
- W2004560074 hasLocation W20045600741 @default.
- W2004560074 hasOpenAccess W2004560074 @default.
- W2004560074 hasPrimaryLocation W20045600741 @default.
- W2004560074 hasRelatedWork W1541519112 @default.
- W2004560074 hasRelatedWork W1579283916 @default.
- W2004560074 hasRelatedWork W1624947593 @default.
- W2004560074 hasRelatedWork W1738735019 @default.
- W2004560074 hasRelatedWork W1936513667 @default.
- W2004560074 hasRelatedWork W1991627955 @default.
- W2004560074 hasRelatedWork W2001584182 @default.
- W2004560074 hasRelatedWork W2042274313 @default.
- W2004560074 hasRelatedWork W2044493643 @default.
- W2004560074 hasRelatedWork W2048228939 @default.
- W2004560074 hasRelatedWork W2051712107 @default.
- W2004560074 hasRelatedWork W2124413043 @default.
- W2004560074 hasRelatedWork W2131177150 @default.
- W2004560074 hasRelatedWork W2139259850 @default.
- W2004560074 hasRelatedWork W2248747383 @default.
- W2004560074 hasRelatedWork W2310021833 @default.
- W2004560074 hasRelatedWork W2915060219 @default.
- W2004560074 hasRelatedWork W3086280807 @default.
- W2004560074 hasRelatedWork W3090046395 @default.
- W2004560074 hasRelatedWork W3210606958 @default.
- W2004560074 isParatext "false" @default.
- W2004560074 isRetracted "false" @default.
- W2004560074 magId "2004560074" @default.
- W2004560074 workType "article" @default.