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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2005940279> ?p ?o ?g. }

• W2005940279 endingPage "1713" @default.
• W2005940279 startingPage "1705" @default.
• W2005940279 created "2016-06-24" @default.
• W2005940279 creator A5000002960 @default.
• W2005940279 creator A5025460183 @default.
• W2005940279 creator A5036270740 @default.
• W2005940279 creator A5036696989 @default.
• W2005940279 creator A5057722293 @default.
• W2005940279 creator A5061416325 @default.
• W2005940279 date "2014-08-28" @default.
• W2005940279 modified "2023-10-14" @default.
• W2005940279 title "Nanoscale electron beam-induced deposition and purification of ruthenium for extreme ultraviolet lithography mask repair" @default.
• W2005940279 cites W1817495804 @default.
• W2005940279 cites W1966160269 @default.
• W2005940279 cites W1967214424 @default.
• W2005940279 cites W1967912910 @default.
• W2005940279 cites W1968634812 @default.
• W2005940279 cites W1969847956 @default.
• W2005940279 cites W1973381743 @default.
• W2005940279 cites W1973988756 @default.
• W2005940279 cites W1974736562 @default.
• W2005940279 cites W1982580999 @default.
• W2005940279 cites W1986119799 @default.
• W2005940279 cites W1996970609 @default.
• W2005940279 cites W2001186731 @default.
• W2005940279 cites W2006955278 @default.
• W2005940279 cites W2014600894 @default.
• W2005940279 cites W2014850397 @default.
• W2005940279 cites W2015343610 @default.
• W2005940279 cites W2018062664 @default.
• W2005940279 cites W2023997863 @default.
• W2005940279 cites W2030232526 @default.
• W2005940279 cites W2030290602 @default.
• W2005940279 cites W2033818506 @default.
• W2005940279 cites W2035223854 @default.
• W2005940279 cites W2037692464 @default.
• W2005940279 cites W2047654209 @default.
• W2005940279 cites W2048977586 @default.
• W2005940279 cites W2057869092 @default.
• W2005940279 cites W2062234484 @default.
• W2005940279 cites W2062295943 @default.
• W2005940279 cites W2065773162 @default.
• W2005940279 cites W2066641757 @default.
• W2005940279 cites W2067504317 @default.
• W2005940279 cites W2072181545 @default.
• W2005940279 cites W2074541297 @default.
• W2005940279 cites W2087599743 @default.
• W2005940279 cites W2089941652 @default.
• W2005940279 cites W2117390340 @default.
• W2005940279 cites W2142978805 @default.
• W2005940279 cites W2144635811 @default.
• W2005940279 cites W2153905347 @default.
• W2005940279 cites W2171627649 @default.
• W2005940279 cites W2316865071 @default.
• W2005940279 cites W2328794161 @default.
• W2005940279 cites W3099278013 @default.
• W2005940279 doi "https://doi.org/10.1007/s00339-014-8745-0" @default.
• W2005940279 hasPublicationYear "2014" @default.
• W2005940279 type Work @default.
• W2005940279 sameAs 2005940279 @default.
• W2005940279 citedByCount "33" @default.
• W2005940279 countsByYear W20059402792014 @default.
• W2005940279 countsByYear W20059402792015 @default.
• W2005940279 countsByYear W20059402792016 @default.
• W2005940279 countsByYear W20059402792017 @default.
• W2005940279 countsByYear W20059402792018 @default.
• W2005940279 countsByYear W20059402792019 @default.
• W2005940279 countsByYear W20059402792020 @default.
• W2005940279 countsByYear W20059402792021 @default.
• W2005940279 countsByYear W20059402792022 @default.
• W2005940279 countsByYear W20059402792023 @default.
• W2005940279 crossrefType "journal-article" @default.
• W2005940279 hasAuthorship W2005940279A5000002960 @default.
• W2005940279 hasAuthorship W2005940279A5025460183 @default.
• W2005940279 hasAuthorship W2005940279A5036270740 @default.
• W2005940279 hasAuthorship W2005940279A5036696989 @default.
• W2005940279 hasAuthorship W2005940279A5057722293 @default.
• W2005940279 hasAuthorship W2005940279A5061416325 @default.
• W2005940279 hasConcept C104779481 @default.
• W2005940279 hasConcept C105163801 @default.
• W2005940279 hasConcept C109486029 @default.
• W2005940279 hasConcept C120665830 @default.
• W2005940279 hasConcept C121332964 @default.
• W2005940279 hasConcept C127313418 @default.
• W2005940279 hasConcept C127413603 @default.
• W2005940279 hasConcept C140205800 @default.
• W2005940279 hasConcept C146024833 @default.
• W2005940279 hasConcept C146088050 @default.
• W2005940279 hasConcept C147120987 @default.
• W2005940279 hasConcept C151730666 @default.
• W2005940279 hasConcept C159985019 @default.
• W2005940279 hasConcept C161790260 @default.
• W2005940279 hasConcept C162996421 @default.
• W2005940279 hasConcept C171250308 @default.
• W2005940279 hasConcept C178790620 @default.
• W2005940279 hasConcept C185592680 @default.
• W2005940279 hasConcept C192562407 @default.
• W2005940279 hasConcept C193016168 @default.
• W2005940279 hasConcept C200274948 @default.
• W2005940279 hasConcept C204223013 @default.

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